CMU MEMS Laboratory Publication Abstract


in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM), pp. 150-153, March 27-29, 2000, San Diego, CA, USA.
Layout Synthesis of CMOS MEMS Accelerometers
V. Gupta and T. Mukherjee
An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parametrized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped parameter analytical equations. The design problem is then formulated into a non-linear constrained optimization problem. Such an approach to automated design of MEMS devices helps the designer to explore design trade-offs efficiently. Synthesis of cell level devices is also required for structured design of integrated MEMS. Designs for a CMOS MEMS accelerometer for different optimization objectives, as well as possible design trade-offs are discussed.
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