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CARAMEL (Contamination And Reliability Analysis
of MicroElectromechanical Layout) is a CAD tool for MEMS
fault model generation. It is based on the integrated circuit
contamination analysis tool CODEF and is capable of analyzing
the impact of contamination particles on the behavior of
microelectromechanical systems. CARAMEL’s simulation output
indicates that a wide range of defective structures are possible
due to the presence of particulate contaminations. Moreover,
electromechanical simulations of CARAMEL’s mesh representations
of defective layout has revealed that a wide variety of
misbehaviors are associated with these defects. Several thousand
contamination simulations were performed using CARAMEL on
the surface micromachined comb-drive resonator. The results
generated by CARAMEL identifies the comb drive as the most
defect prone region of the microresonator and the deposition of
the first structural layer as the most vulnerable processing step.
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Full
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