CMU MEMS Laboratory Publication Abstract


in Sensors and Actuators A: Physical, pp. 118-127, October 1998.
Optimization-based Synthesis Of Microresonators
T. Mukherjee, S. V. Iyer and G. Fedder
The rapid layout synthesis of microresonators from high-level engineering specifications is demonstrated. Functional parameters such as resonant frequency, quality factor, and displacement amplitude at resonance are satisfied while simultaneously minimizing a user-specified objective function. A synthesis tool implementing the optimization-based formulation can be used to explore micromechanical design issues and objectives, as illustrated with a polysilicon lateral resonator example modeled in three mechanical degrees of freedom. Layouts for four sets of five different resonators from 3 kHz to 300 kHz are generated, with each set globally optimized to minimize either active device area, electrostatic drive voltage, a weighted combination of area and drive voltage, or to maximize displacement amplitude at resonance.
© 1998 Elsevier. All rights reserved.
Full paper not available from outside CMU

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