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The rapid layout synthesis of microresonators from high-level engineering specifications is demonstrated. Functional parameters such as resonant frequency, quality factor, and displacement amplitude at resonance are satisfied while simultaneously minimizing a user-specified objective function. A synthesis tool implementing the optimization-based formulation can be used to explore micromechanical design issues and objectives, as illustrated with a polysilicon lateral resonator example modeled in three mechanical degrees of freedom. Layouts for four sets of five different resonators from 3 kHz to 300 kHz are generated, with each set globally optimized to minimize either active device area, electrostatic drive voltage, a weighted combination of area and drive voltage, or to maximize displacement amplitude at resonance.
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