CMU MEMS Laboratory Publication Abstract

 

in Technical Digest of the 18th IEEE International Conference on Microelectromechanical Systems (MEMS), pp. 630-633, Jan. 30-Feb. 3, 2005, Miami Beach, FL.
Mechanical Noise-Limited CMOS-MEMS Accelerometers
J. M. Tsai and G. Fedder
ABSTRACT:
The latest generation of CMOS-MEMS accelerometer has measured mechanical Brownian noise-limited resolution of 45 µg/Hz½ at 1 atm. A modified pre-amplifier design with sub-threshold transistor dc biasing is robust against leakage paths to positive and negative supplies and has an input referred noise of 14.6 nV/Hz½ at the 2 MHz modulation frequency. The accelerometer proof mass is purposely sized to have equivalent mechanical Brownian noise. An array approach to improve the noise floor further is proposed and fabricated.
© 2005 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Full paper (PDF) (opens in new window).


This page was generated in 0.119546 seconds at 09:45:04 am EST on 24 Nov 2017.

overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon