CMU MEMS Laboratory Publication Abstract

 

	in Technical Digest of the 18th IEEE International Conference on Microelectromechanical Systems (MEMS), pp. 630-633, Jan. 30-Feb. 3, 2005, Miami Beach, FL.
	Mechanical Noise-Limited CMOS-MEMS Accelerometers
	J. M. Tsai and G. Fedder ABSTRACT:
	The latest generation of CMOS-MEMS accelerometer has measured mechanical Brownian noise-limited resolution of 45 µg/Hz½ at 1 atm. A modified pre-amplifier design with sub-threshold transistor dc biasing is robust against leakage paths to positive and negative supplies and has an input referred noise of 14.6 nV/Hz½ at the 2 MHz modulation frequency. The accelerometer proof mass is purposely sized to have equivalent mechanical Brownian noise. An array approach to improve the noise floor further is proposed and fabricated.
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