CMU MEMS Laboratory Publication Abstract


in Proceedings of the 2004 IEEE Radio Frequency Integrated Circuits Symposium (RFIC), pp. 579-582, June 6-8, 2004, Fort Worth, TX.
Low-Power LC-VCO using integrated MEMS passives
V. K. Saraf, D. Ramachandran, A. Oz, G. Fedder and T. Mukherjee
Low power RF operation is often limited by the poor quality factor of the passives available in siliconbased processes. This paper reports on a LC-tank VCO incorporating micromachined inductors and capacitors for low power operation without sacrificing performance. Only 2.75 mW of power is needed to achieve -122 dBc/Hz phase noise at 1 MHz from a 2.84 GHz carrier.
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