CMU MEMS Laboratory Publication Abstract


in Journal of Modeling and Simulation of Microsystems, Vol. 2, No. 1, pp. 11-20, June 2001.
MEMS Resonator Synthesis for Defect Reduction
N. Deb, S. V. Iyer, T. Mukherjee and S. Blanton
We combine our MEMS synthesis and test capabilities into a synthesis-for-test environment. A microresonator design meeting a variety of specifications is synthesized. The susceptibility of this design to particles is then measured using our MEMS contamination analyzer. The nature of each defective microresonator is determined and the deviation from nominal performance is correlated to the bounds and design constraints used in the synthesis process. Feedback from this analysis is formulated into additional design constraints for the synthesis tool with the object of minimizing the impact of spot contaminations. Re-synthesis of the same designs using these additional constraints indicates that a certain class of catastrophic and parametric faults can be reduced by 25% without sacrificing performance.
© 2001 Computational Publications. Abstracting is permitted with credit to the source. Other copying, reprint or repoduction requests should be addressed to: Copyrights Manager, Computational Publications, Copyright Office, 899 Rue Jean de Gingins, 01220 Divonne les Bains, France. Computational Publications is a subsuduary of the Applied Computational Researh Society, a non-profit organization
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