CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the 2000 IEEE International Test Conference (ITC), pp. 739-749, October 3-5, 2000, Atlantic City, NJ.
Analysis of Failure Sources in Surface-Micromachined MEMS
N. Deb and S. Blanton
ABSTRACT:
The effect of vertical stiction, foreign particles, and etch variation on the resonant frequency of a surface-micromachined resonator and accelerometer are presented. For each device, it is shown that misbehaviors resulting from different failure sources can overlap, exhibit dominance and combine to create behavior masking and construction. Such an analysis is essential for developing test and diagnosis methodologies for surface-micromachined MEMS.
© 2000 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Full paper (PDF) (opens in new window).


This page was generated in 0.0058 seconds at 02:44:46 am EST on 25 Nov 2017.

overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon