CMU MEMS Laboratory Publication Abstract

 

	in Proceedings of 34th Design Automation Conference (DAC), pp. 680-685, June 9-13, 1997, Anaheim, CA, USA.
	Structured Design Of Microelectromechanical Systems
	T. Mukherjee and G. Fedder ABSTRACT:
	In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of interconnected lumped-parameter elements. An initial library focuses on suspended-MEMS technology from which inertial sensors and other mechanical mechanisms can be designed. The schematic representation has a simulation interface enabling the designer to simulate the design at the component level. Synthesis of MEMS cells for common topologies provides the system designer with rapid, optimized component layout and associated macro-models. A synthesis module is developed for the popular folded-flexure micromechanical resonator topology. The algorithm minimizes a combination of total layout area and voltage applied to the electro-mechanical actuators. Synthesis results clearly show the design limits of behavioral parameters such as resonant frequency for a fixed process technology.
	© 1997 Association for Computing Machinery. Permission to make digital or hard copies of part or all of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credits is permitted. To copy otherwise, to republish, to post on servers or to redistribute to lists, require prior specific permission and/or a fee.
	Full paper (PDF) (opens in new window).

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