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CMU MEMS Laboratory Publication Abstract |
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in Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS (Optical MEMS), pp. 14-15, August 18-21, 2003, Waikoloa, Hawaii. |
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A Two-Axis Electrothermal SCS Micromirror for Biomedical Imaging
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A. Jain, T. Xie, Y. Pan, G. Fedder and H. Xie
ABSTRACT:
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This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by deep-reactive-ion-etch post-CMOS micromachining process.
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© 2003 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
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Full
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