CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS (Optical MEMS), pp. 14-15, August 18-21, 2003, Waikoloa, Hawaii.
A Two-Axis Electrothermal SCS Micromirror for Biomedical Imaging
A. Jain, T. Xie, Y. Pan, G. Fedder and H. Xie
ABSTRACT:
This paper reports a 1 mm2, two-axis, single-crystalline-silicon (SCS)-based aluminum-coated micromirror with large scanning angle (up to 40°), which can be used for biomedical imaging. The micromirror is fabricated by deep-reactive-ion-etch post-CMOS micromachining process.
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