CMU MEMS Laboratory Publication Abstract

 

in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 631 - 634, January 20-24, 2002, Las Vegas, NV, USA.
A copper CMOS-MEMS Z-axis gyroscope
H. Luo, X. Zhu, H. Lakdawala, R. Carley and G. Fedder
ABSTRACT:
© 2002 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Full paper (PDF) (opens in new window).


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