CMU MEMS Laboratory Publication Abstract


in Proceedings of the Fifth ACM/SIGDA Physical Design Workshop (PDW), pp. 76-80, April 15-17, 1996, Reston, VA, USA.
A Vision of Structured CAD for MEMS
G. Fedder
Computer-aided design tools tailored for microelectromechanical systems (MEMS) are needed to enable design of complex systems with multiple energy domains. In an analogy to the VLSI design methodology, physical, structural, and behavioral views of MEMS can be formed and coupled together in an integrated toolset. Of key importance is the formation of parameterized MEMS component libraries to support these views. Fast coupled-domain numerical (physical) simulation and behavioral simulation are required to move freely between the views.
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