CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the Fifth ACM/SIGDA Physical Design Workshop (PDW), pp. 76-80, April 15-17, 1996, Reston, VA, USA.
A Vision of Structured CAD for MEMS
G. Fedder
ABSTRACT:
Computer-aided design tools tailored for microelectromechanical systems (MEMS) are needed to enable design of complex systems with multiple energy domains. In an analogy to the VLSI design methodology, physical, structural, and behavioral views of MEMS can be formed and coupled together in an integrated toolset. Of key importance is the formation of parameterized MEMS component libraries to support these views. Fast coupled-domain numerical (physical) simulation and behavioral simulation are required to move freely between the views.
© 1996 Association for Computing Machinery. Permission to make digital or hard copies of part or all of this work for personal or classroom use is granted without fee provided that copies are not made or distributed for profit or commercial advantage and that copies bear this notice and the full citation on the first page. Copyrights for components of this work owned by others than ACM must be honored. Abstracting with credits is permitted. To copy otherwise, to republish, to post on servers or to redistribute to lists, require prior specific permission and/or a fee.
Full paper (PDF) (opens in new window).


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