CMU MEMS Laboratory Publication Abstract

 

in Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM), pp. 136-139, April 22-25, 2002, San Juan, Puerto Rico.
Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS
Q. Jing, T. Mukherjee and G. Fedder
ABSTRACT:
MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically parameterized lumped behavioral model. A linear beam model is unsuitable for simulation of devices where the beam deflection is large or where axial stress exists in the beam. Due to the complexity of the nonliear beam mechanics, exact analytical solutions are generally unavailable. A nonlinear beam model for behavioral simulation is presented, which captures the geometric nonlinearity caused by large axial stress and large deflection. Very good agreement of the NODAS simulation results of example problems with available analytical solutions and with FEA simulation results verifies the model accuracy.
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