CMU MEMS Laboratory Publication Abstract

 

in Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp. 114-125, May 6-8, 2002, Cannes, France.
Modeling Methodology for a CMOS-MEMS Electrostatic Comb
S. V. Iyer, H. Lakdawala, T. Mukherjee and G. Fedder
ABSTRACT:
empty
© 2002 SPIE - The International Society for Optical Engineering. Any request of reprint should be addressed to spie@spie.org or phone +1 260 676 3290.
Full paper not available from outside CMU


This page was generated in 0.026269 seconds at 02:15:23 am EST on 24 Nov 2017.

overview | projects | people | publications | intranet | resources         © 1998-2009  Carnegie Mellon