CMU MEMS Laboratory Publication Abstract |
in Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp. 114-125, May 6-8, 2002, Cannes, France. | |
Modeling Methodology for a CMOS-MEMS Electrostatic Comb | |
S. V. Iyer, H. Lakdawala, T. Mukherjee and G. Fedder
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© 2002 SPIE - The International Society for Optical Engineering. Any request of reprint should be addressed to spie@spie.org or phone +1 260 676 3290. | |
Full paper not available from outside CMU |
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