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CMU MEMS Laboratory Publication Abstract |
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in Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp. 114-125, May 6-8, 2002, Cannes, France. |
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Modeling Methodology for a CMOS-MEMS Electrostatic Comb
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S. V. Iyer, H. Lakdawala, T. Mukherjee and G. Fedder
ABSTRACT:
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© 2002 SPIE - The International Society for Optical Engineering. Any request of reprint should be addressed to spie@spie.org or phone +1 260 676 3290.
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Full paper not available from outside CMU
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