CMU MEMS Laboratory Publication Abstract

 

	in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head), pp. 255-258, June 2-4, 2002, Hilton Head Island, SC, USA.
	Closed-Loop Control of a Parallel-Plate Microactuator Beyond the Pull-In Limit
	M. S. Lu and G. Fedder ABSTRACT:
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	© 2002 Transducers Research Foundation. All Rights Reserved.
	Full paper (PDF) (opens in new window).

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