CMU MEMS Laboratory Publication Abstract |
in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head), pp. 255-258, June 2-4, 2002, Hilton Head Island, SC, USA. | |
Closed-Loop Control of a Parallel-Plate Microactuator Beyond the Pull-In Limit | |
M. S. Lu and G. Fedder
ABSTRACT: |
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© 2002 Transducers Research Foundation. All Rights Reserved. | |
Full paper (PDF) (opens in new window). |
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