CMU MEMS Laboratory Publication Abstract |
in Technical Digest of the ACM/IEEE International ConferĀence on Computer Aided Design (ICCAD), pp. 367-373, November 10-14, 2002, San Jose, California. | |
Schematic-Based Lumped Parameterized Behavioral Modeling for Suspended MEMS | |
Q. Jing, T. Mukherjee and G. Fedder
ABSTRACT: |
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Schematic-based lumped parameterized behavioral modeling and simulation methodologies have become available since the emergence of analog HDLs. They greatly ease iterative hierarchical multi-domain simulation, which is critical to the design of MEMS. NODAS is one of such tools, with models written in VerilogA and simulation performed within the Cadence framework. |
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Full paper (PDF) (opens in new window). |
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