CMU MEMS Laboratory Publication Abstract


in Proceedings of the 2003 IEEE/ACM Int. Workshop on Behavioral Modeling and Simulation (BMAS), pp. 6 pages, October 7-8, 2003, San Jose, California.
Issues in MEMS macromodeling
G. Fedder
AHDL modeling of MEMS components for system simulation is slowly maturing, however many issues remain regarding interoperability and composability. A discussion of MEMS natures, hierarchy and model partitioning helps to introduce the issues. Specific conventions for interoperability include choice of component reference frame and associated reference directions. A composite discipline extension to AHDLs is proposed to enable a single-port representation of micromechanical connection points in 2-D and 3-D space.
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