CMU MEMS Laboratory Publication Abstract


in Proceedings of the IEEE International Test Conference (ITC), Sep. 30-Oct. 2, 2003, Charlotte, North Carolina.
MEMS Fabrication
G. Fedder
© 2003 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Full paper (PDF) (opens in new window).

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