CMU MEMS Laboratory Publication Abstract

 

in Proceedings of the Fifth ACM/SIGDA Physical Design Workshop (PDW), pp. 53-60, April 15-17, 1996, Reston, VA, USA.
Physical Design for Surface-Micromachined MEMS
G. Fedder and T. Mukherjee
ABSTRACT:
We are developing physical design tools for surface-micromachined MEMS, such as polysilicon microstructures built using MCNC's Multi-User MEMS Process service. Our initial efforts include automation of layout synthesis and behavioral simulation from a MEMS schematic representation. As an example, layout synthesis of a folded-flexure electrostatic comb-drive microresonator is demonstrated. Lumped-parameter electromechanical models with two mechanical degrees-of-freedom link the physical and behavioral parameters of the microresonator. Simulated annealing is used to generate global optimized layouts of five different resonators from 3 kHz to 300kHz starting with mixed-domain behavioral specifications and constraints. Development of the synthesis tool enforces codification of all relevant MEMS design variables and constraints. The synthesis approach allows a rapid exploration of MEMS design issues.
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Full paper (PDF) (opens in new window).


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