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The advent of CMOS micromachining has introduced new design rules for fabrication of integrated CMOS-MEMS devices. This paper presents a context dependent DRC algorithm to handle the issues related to prefabrication verification of such layouts. In addition, problems related to density control, specific to CMOS-MEMS designs, are discussed. An automatic slotter which introduces MEMS-compatible slot holes is presented and its capability demonstrated. Having such verification and correction tools which address the needs of integrated CMOS-MEMS designs will help reduce integrated MEMS design time.
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Full paper not available from outside CMU
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