CMU MEMS Laboratory Publication List

 

 
1. P. Gilgunn, Large Angle Micro-Mirror Arrays in CMOS-MEMS, M.S. Thesis, August 2006, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF)
2. P. Gilgunn and G. Fedder, Flip-Chip Integrated SOI-CMOS-MEMS Fabrication Technology, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 10-13, November 30, -0001.
[Abstract] | pdfs//unknown/0277_gilgunn-0000.pdf This paper is not yet available for download.
3. P. Gilgunn, J. Liu, N. Sarkar and G. Fedder, CMOS-MEMS Lateral Electrothermal Actuators, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 103-114, November 30, -0001.
[Abstract] | pdfs//unknown/0268_gilgunn-0000.pdf This paper is not yet available for download.
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