|CMU MEMS Laboratory Publication List|
|1.||J. Zahn, K. Gabriel and G. Fedder, A Direct Plasma Etch Approach to High Aspect-Ratio Polymer Micromachining with Applications in Bi-MEMS and CMOS-MEMS, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 137-140, January 20-24, 2002, Las Vegas, NV, USA.
|This page was generated in 2.963538 seconds at 12:50:24 pm EDT on 29 Jul 2014.|
overview | projects | people | publications | intranet | resources © 1998-2009 Carnegie Mellon