CMU MEMS Laboratory Publication List


1. J. Zahn, K. Gabriel and G. Fedder, A Direct Plasma Etch Approach to High Aspect-Ratio Polymer Micromachining with Applications in Bi-MEMS and CMOS-MEMS, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 137-140, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
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