CMU MEMS Laboratory Publication List

 

 
1. J. Neumann, D. Greve and I. J. Oppenheim, Comparison of Piezoresistive and Capacitive Ultrasonic Transducers, in SPIE Symposium on Smart Structures & Materials/NDE 2004 (Smart Structures 2004 '04), March 14-18, 2004, San Diego, CA.
[Abstract] | Full paper not available from outside CMU
2. D. Greve, J. Neumann, I. J. Oppenheim, S. P. Pessiki and D. Ozevin, Robust Capacitive MEMS Ultrasonic Transducers for Liquid Immersion, in Proceedings of the 2003 IEEE International Ultrasonics Symposium (UFFC-S '03), October 5-8, 2003, Honolulu, Hawaii.
[Abstract] | Full paper (PDF)
3. X. Zhu, H. Lakdawala, H. Luo, S. Santhanam, D. Greve and G. Fedder, Copper Interconnect Low-K Dielectric Post-CMOS Micromachining, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
4. R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU
5. X. Zhu, D. Greve and G. Fedder, Characterization of Silicon Isotropic Etch by Inductively Coupled Plasma Etch in Post-CMOS Processing, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 568-573, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
6. X. Zhu, D. Greve, R. Lawton, N. Presser and G. Fedder, Factorial Experiment on CMOS-MEMS RIE Post Processing, in 194th Meeting of Electrochemical Society (ECS '98), pp. 33-42, November 1-6, 1998, Boston, MA, USA.
[Abstract] | Full paper not available from outside CMU
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