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J. Neumann, D. Greve and I. J. Oppenheim, Comparison of Piezoresistive and Capacitive Ultrasonic Transducers, in SPIE Symposium on Smart Structures & Materials/NDE 2004 (Smart Structures 2004 '04), March 14-18, 2004, San Diego, CA.
[Abstract] | Full paper not available from outside CMU |
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D. Greve, J. Neumann, I. J. Oppenheim, S. P. Pessiki and D. Ozevin, Robust Capacitive MEMS Ultrasonic Transducers for Liquid Immersion, in Proceedings of the 2003 IEEE International Ultrasonics Symposium (UFFC-S '03), October 5-8, 2003, Honolulu, Hawaii.
[Abstract] | Full paper (PDF) |
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X. Zhu, H. Lakdawala, H. Luo, S. Santhanam, D. Greve and G. Fedder, Copper Interconnect Low-K Dielectric Post-CMOS Micromachining, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU |
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R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU |
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X. Zhu, D. Greve and G. Fedder, Characterization of Silicon Isotropic Etch by Inductively Coupled Plasma Etch in Post-CMOS Processing, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 568-573, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF) |
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X. Zhu, D. Greve, R. Lawton, N. Presser and G. Fedder, Factorial Experiment on CMOS-MEMS RIE Post Processing, in 194th Meeting of Electrochemical Society (ECS '98), pp. 33-42, November 1-6, 1998, Boston, MA, USA.
[Abstract] | Full paper not available from outside CMU |
Your request returns 6 results.
