CMU MEMS Laboratory Publication List

 

 
1. J. Neumann and K. Gabriel, CMOS-MEMS Acoustic Devices, CMOS-MEMS, Wiley-VCH, ISBN 3257310800, pp. 193-224, January 2005.
[Abstract] | Full paper not available from outside CMU
2. J. Neumann and K. Gabriel, A Fully-Integrated CMOS-MEMS Audio Microphone, in The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '03), pp. 230-233, June 8-12, 2003, Boston, Massachusetts.
[Abstract] | Full paper (PDF)
3. G. C. Lopez and K. Gabriel, A Versatile, Fast and Inexpensive Microfabrication Technique Using a One Metal And One Silicon Dioxide Film, in Proceedings of 2002 ASME International Mechanical Engineering Congress & Expositon (IMECE '02), pp. 39240, November 17-22, 2002, New Orleans, LA, USA.
[Abstract] | Full paper not available from outside CMU
4. G. C. Lopez, A. J. Rosenbloom, V. W. Weedn and K. Gabriel, In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant, in Proceedings of 6th Symposium on Micro Total Analysis Systems (MicroTAS '02), November 3-7, 2002, Nara, Japan.
[Abstract] | Full paper not available from outside CMU
5. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 11, Issue 2, pp. 93-101, April 2002.
[Abstract] | Full paper (PDF)
6. J. Zahn, K. Gabriel and G. Fedder, A Direct Plasma Etch Approach to High Aspect-Ratio Polymer Micromachining with Applications in Bi-MEMS and CMOS-MEMS, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 137-140, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
7. B. M. Diamond, J. Neumann and K. Gabriel, Digital Sound Reconstruction Using Arrays of CMOS-MEMS Microspeakers, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 292-295, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
8. J. Neumann and K. Gabriel, CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation, in Sensors and Actuators A: Physical, Volume 95, Issue 2-3, pp. 175-182, January 2002.
[Abstract] | Full paper not available from outside CMU
9. J. Neumann and K. Gabriel, CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation, in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 236-239, January 21-25, 2001, Interlaken, Switzerland.
[Abstract] | Full paper (PDF)
10. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Hilton Head '00), pp. 77-80, June 4-8, 2000, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
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