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1. |
J. Neumann and K. Gabriel, CMOS-MEMS Acoustic Devices, CMOS-MEMS, Wiley-VCH, ISBN 3257310800, pp. 193-224, January 2005.
[Abstract] | Full paper not available from outside CMU |
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2. |
J. Neumann and K. Gabriel, A Fully-Integrated CMOS-MEMS Audio Microphone, in The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '03), pp. 230-233, June 8-12, 2003, Boston, Massachusetts.
[Abstract] | Full paper (PDF) |
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G. C. Lopez and K. Gabriel, A Versatile, Fast and Inexpensive Microfabrication Technique Using a One Metal And One Silicon Dioxide Film, in Proceedings of 2002 ASME International Mechanical Engineering Congress & Expositon (IMECE '02), pp. 39240, November 17-22, 2002, New Orleans, LA, USA.
[Abstract] | Full paper not available from outside CMU |
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4. |
G. C. Lopez, A. J. Rosenbloom, V. W. Weedn and K. Gabriel, In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant, in Proceedings of 6th Symposium on Micro Total Analysis Systems (MicroTAS '02), November 3-7, 2002, Nara, Japan.
[Abstract] | Full paper not available from outside CMU |
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H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 11, Issue 2, pp. 93-101, April 2002.
[Abstract] | Full paper (PDF) |
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6. |
J. Zahn, K. Gabriel and G. Fedder, A Direct Plasma Etch Approach to High Aspect-Ratio Polymer Micromachining with Applications in Bi-MEMS and CMOS-MEMS, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 137-140, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF) |
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7. |
B. M. Diamond, J. Neumann and K. Gabriel, Digital Sound Reconstruction Using Arrays of CMOS-MEMS Microspeakers, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 292-295, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF) |
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8. |
J. Neumann and K. Gabriel, CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation, in Sensors and Actuators A: Physical, Volume 95, Issue 2-3, pp. 175-182, January 2002.
[Abstract] | Full paper not available from outside CMU |
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9. |
J. Neumann and K. Gabriel, CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation, in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 236-239, January 21-25, 2001, Interlaken, Switzerland.
[Abstract] | Full paper (PDF) |
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10. |
H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Hilton Head '00), pp. 77-80, June 4-8, 2000, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF) |
Your request returns 10 results.
