CMU MEMS Laboratory Publication List

 

 
1. B. Li, G. Sauve, M. C. Iovu, M. Jeffries-EL, R. Zhang, J. Cooper, S. Santhanam, L. Schultz, J. C. Revelli, A. Kusne, T. Kowalewski, J. L. Snyder, L. Weiss, G. Fedder, R. D. McCullough and D. N. Lambeth, Volatile Organic Compound Detection Using Nanostructured Copolymers, in Nano Letters Vol. 6 (8), (2006), pp. 1598-1602, October 2006.
[Abstract] | Full paper not available from outside CMU
2. M. J. Bartkovsky, A. Liao, G. Fedder, T. Przybycien and S. Hauan, The Effect of a Distributed Mass Loading on the Frequency Response of a MEMS Mesh Resonator, in Proceedings of the 27th Annual International conference of the IEEE Engineering in Medicine and Biology Society (EMBS '06), pp. 4, Aug. 30-Sep. 3, 2006, New York, NY.
[Abstract] | pdfs/ieee/embs/0252_bartkovsky-2006.pdf This paper is not yet available for download.
3. C. Lo, G. Fedder, J. Stillman, Desensitizing Method for Measurement of Third-order Intermodulation Distortion in CMOS-MEMS Resonators, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '06), pp. 4, June 4-8, 2006, Hilton Head Island, SC, USA.
[Abstract] | pdfs/trf/hilton_head/0253_lo-2006.pdf This paper is not yet available for download.
4. J. Liu, G. Fedder, S. Sassolini and N. Sarkar, Mechanical Properties Measurements of 0.35-?m BiCMOS MEMS Structures, in Technical Proceedings of the NSTI Nanotechnology Conference and Trade Show (Nanotech 2006) (NSTI '06), pp. 546-549, Vol. 3., May 7-11, 2006, Boston, MA.
[Abstract] | Full paper not available from outside CMU
5. S. C. Yao, X. Tang, C. C. Hsieh, Y. Alyousef, M. Vladimer, G. Fedder and C. H. Amon, Micro-Electro-Mechanical Systems (MEMS)-based Micro-scale Direct Methanol Fuel Cell Development, in Energy, pp. v. 31, no. 5, 636-649, April 2006.
[Abstract] | Full paper not available from outside CMU
6. N. Sarkar, C. Baur, E. Stach, Z. Jandric, R. Stallcup, M. Ellis, G. Skidmore and G. Fedder, Modular MEMS Experimental Platform for Transmission Electron Microscopy, in Proceedings of the 19th IEEE International Conference on Microelectromechanical Systems (MEMS '06), pp. 146-149., Jan. 31-Feb. 4, 2006, Istanbul, Turkey.
[Abstract] | pdfs/ieee/mems/0255_sarkar-2006.pdf This paper is not yet available for download.
7. G. Fedder, MEMS Resonant Mixer Filters, in Proceedings of the International Electron Devices Meeting (IEEE IEDM '05), December 5-7, 2005, Washington D.C..
[Abstract] | Full paper (PDF)
8. G. L. Subrebost and G. Fedder, Silicon-based Microdialysis Chip with Integrated Fraction Collection, in Proceedings of the IEEE Sensors Conference (IEEE Sensors '05), pp. 179-182, Oct. 31-Nov. 3, 2005, Irvine, CA.
[Abstract] | Full paper (PDF)
9. G. Fedder, CMOS Based Sensors, in Proceedings of the IEEE Sensors Conference (IEEE Sensors '05), pp. 125-128, Oct. 31-Nov. 3, 2005, Irvine, CA.
[Abstract] | Full paper (PDF)
10. J. F. Alfaro, L. Weiss, P. G. Campbell, M. C. Miller, C. Heyward, J. S. Doctor and G. Fedder, BioImplantable Bone Stress Sensor, in Proceedings of the 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference (EMBS '05), September 1-4, 2005, Shanghai, China.
[Abstract] | Full paper (PDF)
11. I. Voiculescu, M. E. Zaghloul, R. A. McGill, E. J. Houser and G. Fedder, Electrostatically Actuated Resonant Microcantilever Beam in CMOS Technology for the Detection of Chemical Weapons, in IEEE Sensors Journal, pp. vol. 5, no. 4, 641-647, August 2005.
[Abstract] | Full paper (PDF)
12. G. Fedder and T. Mukherjee, Integrated RF Microsystems with CMOS-MEMS Components, in Proceedings of MEMSWAVE (MEMSWAVE '05), pp. 111-115, June 23-24, 2005, Lausanne, Switzerland.
[Abstract] | Full paper not available from outside CMU
13. S. Bedair and G. Fedder, Polymer Wicking To Mass Load Cantilevers for Chemical Gravimetric Sensors, in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), pp. 2035-2039, June 5-9, 2005, Seoul, Korea.
[Abstract] | Full paper (PDF)
14. C. Lo, F. Chen and G. Fedder, Integrated HF CMOS-MEMS Square-Frame Resonators with On-Chip Electronics and Electrothermal Narrow Gap Mechanism, in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), pp. 2074-2077, June 5-9, 2005, Seoul, Korea.
[Abstract] | Full paper (PDF)
15. P. Basset, J. F. Alfaro, D. Novosel, A. de la Plaza, D. Stancil and G. Fedder, "Chip-Size" Antennas for Implantable Sensors and Smart Dust, in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), pp. 457-460, June 5-9, 2005, Seoul, Korea.
[Abstract] | Full paper (PDF)
16. T. Mukherjee, G. Fedder, H. Akyol, U. Arslan, J. Brotz, F. Chen, A. Jajoo, C. Lo, A. Oz, D. Ramachandran and V. K. Saraf, Reconfigurable MEMS-enabled RF Circuits for Spectrum Sensing, in Government Microcircuit Applications and Critical Technology Conference 2005 (GOMACTech '05), April 4-7, 2005, Las Vegas, NV.
[Abstract] | Full paper not available from outside CMU
17. G. Fedder and T. Mukherjee, Tunable RF and Analog Circuits Using On-Chip MEMS Passive Components, in Proceedings of the IEEE International Solid-State Circuits Conference (ISSCC '05), pp. 390-391, February 6-10, 2005, San Francisco, CA.
[Abstract] | Full paper (PDF)
18. J. M. Tsai and G. Fedder, Mechanical Noise-Limited CMOS-MEMS Accelerometers, in Technical Digest of the 18th IEEE International Conference on Microelectromechanical Systems (MEMS '05), pp. 630-633, Jan. 30-Feb. 3, 2005, Miami Beach, FL.
[Abstract] | Full paper (PDF)
19. F. Chen, J. Brotz, U. Arslan, C. Lo, T. Mukherjee and G. Fedder, CMOS-MEMS Resonant RF Mixer-Filters, in Technical Digest of the 18th IEEE International Conference on Microelectromechanical Systems (MEMS '05), pp. 24-27, Jan. 30-Feb. 3, 2005, Miami Beach, FL.
[Abstract] | Full paper (PDF)
20. T. Mukherjee and G. Fedder, RF CMOS MEMS, CMOS-MEMS, Wiley-VCH, ISBN 3257310800, pp. 225-256, January 2005.
[Abstract] | Full paper not available from outside CMU
21. G. Fedder, J. Chae, K. Najafi, T. Denison, J. Kuang and S. Lewis, Monolithically Integrated Inertial Sensors, CMOS-MEMS, Wiley-VCH, ISBN 3257310800, pp. 137-191, January 2005.
[Abstract] | Full paper not available from outside CMU
22. H. Baltes, O. Brand, G. Fedder, C. Hierold, J. Korvink and O. Tabata, CMOS-MEMS, Wiley-VCH, ISBN 3257310800, January 2005.
[Abstract] | Full paper not available from outside CMU
23. S. Bedair and G. Fedder, CMOS MEMS Oscillator for Gas Chemical Detection, in Proceedings of the 3rd IEEE Sensors Conference (IEEE Sensors '04), pp. 955-958, October 24-27, 2004, Vienna, Austria.
[Abstract] | Full paper (PDF)
24. M. S. Lu and G. Fedder, Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 13, Issue 2, pp. 759-769, October 2004.
[Abstract] | Full paper (PDF)
25. G. C. Lopez and G. Fedder, Suspended Porous Cellulose Acetate Membranes for Microdialysis Use, in Proceedings of 8th Symposium on Micro Total Analysis Systems (MicroTAS '04), pp. 252-254, vol. 2, September 26-30, 2004, Malmo, Sweden.
[Abstract] | Full paper not available from outside CMU
26. S. C. Yao, G. Fedder, X. Tang, C. C. Hsieh, Y. Alyousef, M. Vladimer and C. H. Amon, Thermo-Fluids Considerations in the Development of a Silicon-based Micro-scale Direct Methanol Fuel Cell, in International Thermal Science Seminar - ITSS II (ITSS II '04), June 13-16, 2004, Bled, Slovenia.
[Abstract] | Full paper not available from outside CMU
27. A. Jain, H. Qu, S. Todd, G. Fedder and H. Xie, Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '04), June 6-10, 2004, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
28. A. Oz and G. Fedder, CMOS/BICMOS Self-Assembling and Electrothermal Microactuators for Tunable Capacitors, Gap-Closing Structures and Latch Mechanisms, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '04), June 6-10, 2004, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
29. D. Ramachandran, A. Oz, V. K. Saraf, G. Fedder and T. Mukherjee, MEMS-enabled Reconfigurable VCO and RF Filter, in Proceedings of the 2004 IEEE Radio Frequency Integrated Circuits Symposium (RFIC '04), pp. 251-254, June 6-8, 2004, Fort Worth, TX.
[Abstract] | Full paper (PDF)
30. V. K. Saraf, D. Ramachandran, A. Oz, G. Fedder and T. Mukherjee, Low-Power LC-VCO using integrated MEMS passives, in Proceedings of the 2004 IEEE Radio Frequency Integrated Circuits Symposium (RFIC '04), pp. 579-582, June 6-8, 2004, Fort Worth, TX.
[Abstract] | Full paper (PDF)
31. A. Jain, A. Kopa, Y. Pan, G. Fedder and H. Xie, A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography, in IEEE Journal of Selected Topics in Quantum Electronics, Volume 10, Number 3, pp. 636-642, June 2004.
[Abstract] | Full paper (PDF)
32. J. Wu, G. Fedder and R. Carley, A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-μg/ÖHz Monolithic CMOS MEMS Accelerometer, in IEEE Journal of Solid-State Circuits, Volume 39, Issue 21, pp. 722-730, May 2004.
[Abstract] | Full paper (PDF)
33. H. Lakdawala and G. Fedder, Temperature stabilization of CMOS capacitive accelerometers, in Journal Of Micromechanics And Microengineering, Volume 14, Number 4, pp. 559-566, April 2004.
[Abstract] | Full paper not available from outside CMU
34. T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic Optical Coherence Tomography With A Modified Microelectromechanical Systems Mirror For Detection of Bladder Cancers, in Applied Optics, pp. 6422-6426, vol. 42, no. 31, November 2003.
[Abstract] | Full paper not available from outside CMU
35. T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic optical coherence tomography with new MEMS mirror, in Electronics Letters 39, pp. 1535-1536, October 2003.
[Abstract] | Full paper (PDF)
36. G. Wong, G. Tse, Q. Jing, T. Mukherjee and G. Fedder, Accuracy and composability in NODAS, in Proceedings of the 2003 IEEE/ACM Int. Workshop on Behavioral Modeling and Simulation (BMAS '03), pp. 82 - 87, October 7-8, 2003, San Jose, California.
[Abstract] | Full paper (PDF)
37. G. Fedder, Issues in MEMS macromodeling, in Proceedings of the 2003 IEEE/ACM Int. Workshop on Behavioral Modeling and Simulation (BMAS '03), pp. 6 pages, October 7-8, 2003, San Jose, California.
[Abstract] | Full paper (PDF)
38. H. Xie and G. Fedder, Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope, in IEEE Sensors Journal, pp. 622-631, October 2003.
[Abstract] | Full paper (PDF)
39. G. Fedder, MEMS Fabrication, in Proceedings of the IEEE International Test Conference (ITC '03), Sep. 30-Oct. 2, 2003, Charlotte, North Carolina.
[Abstract] | Full paper (PDF)
40. A. Oz, V. K. Saraf, D. Ramachandran, G. Fedder and T. Mukherjee, Frequency-hopping circuits based on reconfigurable MEMS capacitors, in Proceedings of SRC Techcon (SRC Techcon '03), August 25-27, 2003, Dallas, Texas.
[Abstract] | Full paper not available from outside CMU
41. A. Jain, T. Xie, Y. Pan, G. Fedder and H. Xie, A Two-Axis Electrothermal SCS Micromirror for Biomedical Imaging, in Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS (Optical MEMS '03), pp. 14-15, August 18-21, 2003, Waikoloa, Hawaii.
[Abstract] | Full paper (PDF)
42. H. Xie, Y. Pan and G. Fedder, A CMOS-MEMS mirror with curled-hinge comb drives, in IEEE/ASME Journal of Microelectromechanical Systems, pp. 450-457, August 2003.
[Abstract] | Full paper (PDF)
43. A. Oz and G. Fedder, RF CMOS-MEMS Capacitor Having Large Tuning Range, in The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '03), pp. 851-854, June 8-12, 2003, Boston, Massachusetts.
[Abstract] | Full paper (PDF)
44. A. Oz and G. Fedder, CMOS-compatible RF-MEMS tunable capacitors, in Proceedings of the 2003 IEEE Radio Frequency Integrated Circuits Symposium (RFIC '03), pp. 611-614, June 8-10, 2003, Philadelphia, Pennsylvania.
[Abstract] | Full paper (PDF)
45. A. Oz and G. Fedder, CMOS Electrothermal Lateral Micromovers for Actuation and Self-Assembly, in Proceedings of the 2003 SEM Annual Conference on Experimental and Applied Mechanics (SEM Annual '03), June 2-4, 2003, Charlotte, North Carolina.
[Abstract] | Full paper not available from outside CMU
46. H. Xie, A. Jain, T. Xie, Y. Pan and G. Fedder, A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications, in Proceedings of CLEO 2003 (CLEO '03), June 1-6, 2003, Baltimore, MD.
[Abstract] | Full paper not available from outside CMU
47. H. Xie and G. Fedder, Integrated microelectromechanical gyroscopes, in Journal of Aerospace Engineering, pp. 65-67, April 2003.
[Abstract] | Full paper not available from outside CMU
48. H. Xie, G. Fedder, Y. Pan and W. Frey, Design and Fabrication of An Integrated CMOS-MEMS 3-Axis Accelerometer, in Technical Proceedings of the Sixth International Conference on Modeling and Simulation of Microsystems Semiconductors, Sensors and Actuators (MSM '03), pp. 292-295, February 24-26, 2003, San Francisco, California.
[Abstract] | Full paper not available from outside CMU
49. H. Luo, G. Fedder and R. Carley, Integrated Multiple-Device IMU Systems with Continuous-Time Sensing Circuitry, in Proceedings of the IEEE International Solid-State Circuits Conference (ISSCC '03), pp. 2 pages, February 9-13, 2003, San Francisco, California.
[Abstract] | Full paper (PDF)
50. H. Yun, M. E. Patton, J. H. Garrett, G. Fedder, K. M. Frederick, J. J. Hsu, I. J. Lowe, I. J. Oppenheim and P. J. Sides, Detection of free chloride in concentrate by NMR, in Cement and Concrete Research: An International Journal, January 2003.
[Abstract] | Full paper not available from outside CMU
51. X. Zhu, R. Groves, S. Subbana, D. Jadus, T. Mukherjee and G. Fedder, Micromachined On-Chip Inductor Performance Analysis, in Proceedings of the 16th IEEE International Conference on Microelectromechanical Systems (MEMS '03), pp. 165-168, January 19-23, 2003, Kyoto, Japan.
[Abstract] | Full paper (PDF)
52. H. Xie, Y. Pan and G. Fedder, Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror, in Sensors & Actuators A, pp. 237-241, January 2003.
[Abstract] | Full paper not available from outside CMU
53. S. C. Yao, G. Fedder, C. H. Amon, C. C. Hsieh, X. Tang and Y. Alyousef, Design of Direct Methanol Micro Fuel Cell Fluidic Systems, in Proceedings of 2002 ASME International Mechanical Engineering Congress & Expositon (IMECE '02), pp. 32567, November 17-22, 2002, New Orleans, LA, USA.
[Abstract] | Full paper not available from outside CMU
54. Q. Jing, T. Mukherjee and G. Fedder, Schematic-Based Lumped Parameterized Behavioral Modeling for Suspended MEMS, in Technical Digest of the ACM/IEEE International Confer­ence on Computer Aided Design (ICCAD '02), pp. 367-373, November 10-14, 2002, San Jose, California.
[Abstract] | Full paper (PDF)
55. H. Xie, G. Fedder, Y. Pan and W. Frey, Phase and Vibration Analysis for a CMOS-MEMS Gyroscope, in International Journal of Nonlinear Sciences and Numerical Simulation, pp. 319-324, vol.3, no. 3-4, August 2002.
[Abstract] | Full paper not available from outside CMU
56. H. Xie and G. Fedder, A DRIE MEMS Gyroscope, in Proceedings of the IEEE Sensors Conference (IEEE Sensors '02), pp. 1413-1418, July 11-14, 2002, Orlando, Florida.
[Abstract] | Full paper (PDF)
57. M. S. Lu and G. Fedder, Closed-Loop Control of a Parallel-Plate Microactuator Beyond the Pull-In Limit, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '02), pp. 255-258, June 2-4, 2002, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
58. H. Luo, G. Zhang, R. Carley and G. Fedder, A Post-CMOS Micromachined Lateral Accelerometer, in IEEE/ASME Journal of Microelectromechanical Systems, pp. 188-195, June 2002.
[Abstract] | Full paper (PDF)
59. S. V. Iyer, H. Lakdawala, T. Mukherjee and G. Fedder, Modeling Methodology for a CMOS-MEMS Electrostatic Comb, in Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP '02), pp. 114-125, May 6-8, 2002, Cannes, France.
[Abstract] | Full paper not available from outside CMU
60. T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic optical coherence tomography with a micromachined mirror, in Proceedings of the 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology (EMBS-MMB '02), May 2-4, 2002, Madison, Wisconsin.
[Abstract] | Full paper (PDF)
61. Q. Jing, T. Mukherjee and G. Fedder, Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS, in Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02), pp. 136-139, April 22-25, 2002, San Juan, Puerto Rico.
[Abstract] | Full paper not available from outside CMU
62. J. F. Alfaro and G. Fedder, Actuation for Probe-Based Mass Data Storage, in Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02), pp. 202-205, April 22-25, 2002, San Juan, Puerto Rico.
[Abstract] | Full paper not available from outside CMU
63. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 11, Issue 2, pp. 93-101, April 2002.
[Abstract] | Full paper (PDF)
64. H. Yun, M. E. Patton, J. H. Garrett, G. Fedder, K. M. Frederick, J. J. Hsu, I. J. Lowe, I. J. Oppenheim and P. J. Sides, Developments in chlorine detection in concrete using NMR, in Proceedings of 2002 SPIE Smart Systems for Bridges, Structures, and Highways 4696, part of SPIE's 9th Annual International Symposium on Smart Structures and Materials (SPIE Bridges '02), pp. 310-321, March 17-21, 2002, San Diego, California.
[Abstract] | Full paper not available from outside CMU
65. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in IEEE Journal of Solid-State Circuits, Volume 37, Issue 3, pp. 394-403, March 2002.
[Abstract] | Full paper (PDF)
66. J. Wu, G. Fedder and R. Carley, A Low-Noise Low-Offset Chopper-Stabilized Capacitive-Readout Amplifier for CMOS MEMS Accelerometers, in Proc. of the IEEE International Solid-State Circuits Conference (ISSCC '02), pp. 428-429, 478, February 4-6, 2002, San Francisco, California.
[Abstract] | Full paper (PDF)
67. J. Zahn, K. Gabriel and G. Fedder, A Direct Plasma Etch Approach to High Aspect-Ratio Polymer Micromachining with Applications in Bi-MEMS and CMOS-MEMS, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 137-140, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
68. H. Luo, X. Zhu, H. Lakdawala, R. Carley and G. Fedder, A copper CMOS-MEMS Z-axis gyroscope, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 631 - 634, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
69. H. Xie, Y. Pan and G. Fedder, A SCS CMOS Micromirror for Optical Coherence Tomographic Imaging, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 495-599, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
70. H. Lakdawala and G. Fedder, Temperature control of CMOS micromachined sensors, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 324-327, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
71. H. Xie and G. Fedder, Vertical Comb-Finger Capacitive Actuation and Sensing for CMOS-MEMS, in Sensors and Actuators A: Physical, Volume 95, Issue 2-3, pp. 212-221, January 2002.
[Abstract] | Full paper not available from outside CMU
72. Y. Pan, H. Xie and G. Fedder, Endoscopic Optical Coherence Tomography based on a Microelectromechanical Mirror, in Optics Letters, Volume 26, Issue 24, pp. 1966-1968, December 2001.
[Abstract] | Full paper not available from outside CMU
73. H. Xie, Y. Pan and G. Fedder, A CMOS-MEMS Micromirror With Large Out-of-Plane Actuation, in Proceedings of 2001 ASME International Mechanical Engineering Congress & Expositon (IMECE '01), November 11-16, 2001, New York, NY, USA.
[Abstract] | Full paper not available from outside CMU
74. R. Carley, R. T. El-Sayed, D. F. Guillou, J. F. Alfaro, G. Fedder, S. Schlosser, D. Nagle, G. Ganger and J. Bain, MEMS memory elements, in Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS '01), pp. 1-5, November 7-8, 2001, San Diego CA.
[Abstract] | Full paper not available from outside CMU
75. Q. Jing, T. Mukherjee and G. Fedder, Schematic-based design of integrated MEMS, in Symposium on Computational Methods for Adaptive Structures and MEMS, 6th US National Congress on Computational Mechanics (USNCCM '01), pp. 581, August 1-4, 2001, Dearborn, Michigan.
[Abstract] | Full paper not available from outside CMU
76. F. Chen, H. Xie and G. Fedder, A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control, in IEEE Transactions on Magnetics, Volume 37, Issue 4, pp. 1915-1918, July 2001.
[Abstract] | Full paper (PDF)
77. X. Zhu, H. Lakdawala, H. Luo, S. Santhanam, D. Greve and G. Fedder, Copper Interconnect Low-K Dielectric Post-CMOS Micromachining, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
78. H. Lakdawala and G. Fedder, CMOS Micromachined Infrared Imager Pixel, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
79. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (CICC '01), pp. 579-582, May 6-9, 2001, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
80. S. V. Iyer, H. Lakdawala, G. Fedder and T. Mukherjee, Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams, in Technical Proceedings of the Fourth International Conference on Modeling and Simulation of Microsystems (MSM '01), pp. 88-91, March 19-21, 2001, Hilton Head, SC, USA.
[Abstract] | Full paper not available from outside CMU
81. S. V. Iyer, Q. Jing, G. Fedder and T. Mukherjee, Convergence and Speed Issues in Analog HDL Model Formulation for MEMS, in Technical Proceedings of the Fourth International Conference on Modeling and Simulation of Microsystems (MSM '01), pp. 590-593, March 19-21, 2001, Hilton Head, SC, USA.
[Abstract] | Full paper not available from outside CMU
82. H. Xie and G. Fedder, A CMOS-MEMS Lateral-axis Gyroscope, in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 162-165, January 21-25, 2001, Interlaken, Switzerland.
[Abstract] | Full paper (PDF)
83. T. Mukherjee, G. Fedder, D. Ramaswamy and J. White, Emerging Simulation Approaches for Micromachined Devices, in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Volume 19, Issue 12, pp. 1572-1589, December 2000.
[Abstract] | Full paper (PDF)
84. H. Luo, G. Fedder and R. Carley, An Elastically Gimbaled Z-Axis CMOS-MEMS Gyroscope, in Proceedings of International Symposium on Smart Structures and Microsystems 2000 (IS3M '00), pp. 1-6, October 19-21, 2000, Hong Kong.
[Abstract] | Full paper (PDF)
85. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18um Cu Interconnect Low-K CMOS Process, in Proceedings of SRC Techcon (SRC Techcon '00), September 21-23, 2000, Phoenix, AZ, USA.
[Abstract] | Full paper not available from outside CMU
86. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Hilton Head '00), pp. 77-80, June 4-8, 2000, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
87. R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU
88. H. Xie, L. Erdmann, Q. Jing and G. Fedder, Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives, in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM '00), pp. 181-184, March 27-29, 2000, San Diego, CA, USA.
[Abstract] | Full paper not available from outside CMU
89. S. Vemuri, G. Fedder and T. Mukherjee, Low-Order Squeeze Film Model for Simulation of MEMS Devices, in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM '00), pp. 205-208, March 27-29, 2000, San Diego, CA, USA.
[Abstract] | Full paper not available from outside CMU
90. G. Fedder, Top-Down Design of MEMS, in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM '00), pp. 7-10, March 27-29, 2000, San Diego, CA, USA.
[Abstract] | Full paper not available from outside CMU
91. X. Zhu, D. Greve and G. Fedder, Characterization of Silicon Isotropic Etch by Inductively Coupled Plasma Etch in Post-CMOS Processing, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 568-573, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
92. Q. Jing, H. Luo, T. Mukherjee, R. Carley and G. Fedder, CMOS Micromechanical Bandpass Filter Design Using a Hierarchical MEMS Circuit Library, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 187-192, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
93. H. Xie and G. Fedder, A CMOS Z-AXIS CAPACITIVE ACCELEROMETER WITH COMB-FINGER SENSING, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 496-501, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
94. H. Luo, G. Fedder and R. Carley, A 1 mG LATERAL CMOS-MEMS ACCELEROMETER, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 502-507, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
95. G. Fedder and T. Mukherjee, Path Toward Future CAD Environments for MEMS, in IEEE/ACM Digest of Technical Papers (ICCAD '99), pp. 606, November 7-11, 1999, San Jose, California.
[Abstract] | Full paper (PDF)
96. Q. Jing, T. Mukherjee and G. Fedder, A Design Methodology for Micromechanical Bandpass Filters, in Proceedings of 1999 IEEE/ACM/VIUF Intl. Workshop on Behavioral Modeling and Simulation (BMAS '99), October 4-6, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
97. T. Mukherjee, G. Fedder and S. Blanton, Hierarchical Design and Test of Integrated Microsystems, in IEEE Design & Test Magazine, pp. 18-27, October 1999.
[Abstract] | Full paper (PDF)
98. G. Fedder and Q. Jing, A Hierarchical Circuit-Level Design Methodology Microelectromechanical Systems, in IEEE Transactions on Circuits & Systems II (TCAS), Volume 46, Issue 10, pp. 1309-1315, October 1999.
[Abstract] | Full paper (PDF)
99. K. M. Frederick and G. Fedder, Mechanical effects of fatigue and charge on CMOS MEMS, in Proceedings of SPIE Conference 4180: MEMS Reliability for Critical Applications (SPIE 4180 '99), pp. 108-116, September 17-20, 1999, Santa Clara, CA, USA.
[Abstract] | Full paper not available from outside CMU
100. T. Mukherjee and G. Fedder, Hierarchical Mixed-Domain Circuit Simulation, Synthesis and Extraction Methodology for MEMS, in Journal of VLSI Signal Processing-Systems for Signal, Image, and Video Technology, vol. 21, no. 3, pp. 233-249, July 1999.
[Abstract] | Full paper not available from outside CMU
101. S. C. Eagle and G. Fedder, Writing nanometer-scale pits in sputtered carbon films using the scanning tunneling microscope, in Applied Physics Letters, Volume 74, Number 25, pp. 3902-3903, June 1999.
[Abstract] | Full paper not available from outside CMU
102. H. Lakdawala and G. Fedder, Analysis Of Temperature-dependent Residual Stress Gradients In CMOS Micromachined Structures, in Proceedings of 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), pp. 526-529, June 7-10, 1999, Sendai, Japan.
[Abstract] | Full paper not available from outside CMU
103. A. Dewey, H. Dussault, J. Hanna, E. Christen, G. Fedder, B. Romanowicz and M. Maher, Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS, in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM '99), pp. pp. 139-142, April 19-21, 1999, San Juan, PR, USA.
[Abstract] | Full paper not available from outside CMU
104. M. S. Lu and G. Fedder, Parameterized Electrostatic Gap Models for Structured Design of Microelectromechanical Systems, in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM '99), pp. 280-283, April 19-21, 1999, San Juan, PR, USA.
[Abstract] | Full paper not available from outside CMU
105. H. Lakdawala, B. Baidya, T. Mukherjee and G. Fedder, Intelligent Automatic Meshing Of Multilayer CMOS Micromachined Structures For Finite Element Analysis, in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM '99), pp. 297-300, April 19-21, 1999, San Juan, PR, USA.
[Abstract] | Full paper not available from outside CMU
106. G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
107. T. Mukherjee, Y. Zhou and G. Fedder, Automated Optimal Synthesis of Microaccelerometers, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 326-331, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
108. G. Fedder, Structured Design of Integrated MEMS, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 1-8, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
109. X. Zhu, D. Greve, R. Lawton, N. Presser and G. Fedder, Factorial Experiment on CMOS-MEMS RIE Post Processing, in 194th Meeting of Electrochemical Society (ECS '98), pp. 33-42, November 1-6, 1998, Boston, MA, USA.
[Abstract] | Full paper not available from outside CMU
110. Q. Jing and G. Fedder, NODAS 1.3 - Nodal Design Of Actuators And Sensors, in Proceedings of 1998 IEEE/VIUF International Workshop on Behavioral Modeling and Simulation (BMAS '98), October 26-28, 1998, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
111. T. Mukherjee, S. V. Iyer and G. Fedder, Optimization-based Synthesis Of Microresonators, in Sensors and Actuators A: Physical, pp. 118-127, October 1998.
[Abstract] | Full paper not available from outside CMU
112. T. Mukherjee and G. Fedder, Design Methodology for Mixed-Domain Systems-on-a-Chip, in Proceedings of IEEE Computer Society Workshop on VLSI/1998 System Level Design (IWV '98), pp. 96-101, April 16-17, 1998, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
113. M. S. Lu, X. Zhu and G. Fedder, Mechanical Property Measurement Of 0.5-µm CMOS Microstructures, in Proceedings of Materials Research Society 1998 Spring Meeting (MRS '98), pp. 27-32, April 13-17, 1998, San Francisco, CA, USA.
[Abstract] | Full paper not available from outside CMU
114. J. E. Vandemeer, M. S. Kranz and G. Fedder, Hierarchical Representation and Simulation of Micromachined Inertial Sensors, in Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM '98), pp. 540-545, April 6-8, 1998, Santa Clara, CA, USA.
[Abstract] | Full paper not available from outside CMU
115. S. V. Iyer, T. Mukherjee and G. Fedder, Multi-mode Sensitive Layout Synthesis of Microresonator, in Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators (MSM '98), pp. 392-397, April 6-8, 1998, Santa Clara, CA, USA.
[Abstract] | Full paper not available from outside CMU
116. S. Blanton, G. Fedder and T. Mukherjee, Hierarchical Design & Test of MEMS, MST News: International Newsletter on Microsystems and MEMS, pp. 28-31, vol. 1998, no. 1, March 1998.
[Abstract] | Full paper not available from outside CMU
117. J. E. Vandemeer, M. S. Kranz and G. Fedder, Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom, in Proceedings of ASME Winter Annual Conference (ASME WAM '97), pp. 113-118, November 16-21, 1997, Dallas, TX, USA.
[Abstract] | Full paper not available from outside CMU
118. G. Fedder, Integrated MEMS in Conventional CMOS, in Proceedings of the NSF/ASME Workshop on Tribology Issues and Opportunities in MEMS (Tribology '97), pp. 2821-2824, November 9-11, 1997, Columbus, OH, USA.
[Abstract] | Full paper not available from outside CMU
119. M. S. Kranz and G. Fedder, Micromechanical Vibratory Rate Gyroscopes Fabricated in Conventional CMOS, in Symposium Gyro Technology 1997 (SGT '97), pp. 3.0-3.8, September 16-17, 1997, Stuttgart, Germany.
[Abstract] | Full paper not available from outside CMU
120. G. Fedder, S. V. Iyer and T. Mukherjee, Automated Optimal Synthesis Of Microresonators, in Proceedings of 9th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '97), pp. 1109-1112, June 16-19, 1997, Chicago, IL, USA.
[Abstract] | Full paper (PDF)
121. T. Mukherjee and G. Fedder, Structured Design Of Microelectromechanical Systems, in Proceedings of 34th Design Automation Conference (DAC '97), pp. 680-685, June 9-13, 1997, Anaheim, CA, USA.
[Abstract] | Full paper (PDF)
122. G. Fedder, Integrated Microelectromechanical Systems in Conventional CMOS, in Proceedings of the 1997 IEEE International Symposium on Circuits and Systems (ISCAS '97), pp. 2821-2824, June 9-12, 1997, Hong Kong.
[Abstract] | Full paper (PDF)
123. G. Fedder and R. T. Howe, Multimode Digital Control of a Suspended Polysilicon Microstructure, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 5, Issue 4, pp. 283-297, December 1996.
[Abstract] | Full paper (PDF)
124. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Sensors & Actuators A, vol. 57, no.2, pp. 103-110, November 1996.
[Abstract] | Full paper not available from outside CMU
125. R. M. Voyles, G. Fedder and P. Khosla, Design of a Modular Tactile Sensor and Actuator Based on Electrorheological Gel, in Proceedings of the IEEE International Conference on Robotics and Automation (ICRA '96), pp. 13-17, April 22-28, 1996, Minneapolis, MN.
[Abstract] | Full paper (PDF)
126. G. Fedder, A Vision of Structured CAD for MEMS, in Proceedings of the Fifth ACM/SIGDA Physical Design Workshop (PDW '96), pp. 76-80, April 15-17, 1996, Reston, VA, USA.
[Abstract] | Full paper (PDF)
127. G. Fedder and T. Mukherjee, Physical Design for Surface-Micromachined MEMS, in Proceedings of the Fifth ACM/SIGDA Physical Design Workshop (PDW '96), pp. 53-60, April 15-17, 1996, Reston, VA, USA.
[Abstract] | Full paper (PDF)
128. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Technical Digest of the 9th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '96), pp. 13-18, February 15-17, 1996, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
129. G. Fedder and K. H. Clark, Modeling and Simulation of Microresonators with Meander Suspensions, in Proceedings of the 1st International Conference on Simulation and Design of Microsystems and Microstructures (Microsim '95), pp. 175-183, September 26-28, 1995, Southampton, UK.
[Abstract] | Full paper not available from outside CMU
130. G. Fedder, Simulation of Microelectromechanical Systems, Ph.D. Thesis, May 1994, University of California - Berkeley, Berkeley, CA.
[Abstract] | Full paper not available from outside CMU
131. G. Fedder, J. C. Chang and R. T. Howe, Thermal Assembly of Polysilicon Microstructures with Narrow-Gap Electrostatic Comb Drive, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '92), pp. 63-68, June 22-25, 1992, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
132. G. Fedder and R. T. Howe, Thermal Assembly of Polysilicon Microstructures, in Proceedings of the 4th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '91), pp. 63-68, Jan. 30-Feb. 2, 1991, Nara, Japan.
[Abstract] | Full paper (PDF)
133. G. Fedder, D. T. Barkand, S. Bedair, N. Garg, J. Greenblatt, R. Jin, D. N. Lambeth, N. Lazarus, T. R. Rozzi, S. Santhanam, L. Schultz, J. L. Snyder, L. Weiss and J. Wu, Jetted Nanoparticle Chemical Sensor Circuits for Respirator End-of-Service-Life Detection, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 2 pp, November 30, -0001.
[Abstract] | pdfs//unknown/0280_fedder-0000.pdf This paper is not yet available for download.
134. S. Bedair and G. Fedder, CMOS-MEMS Microgroove Cantilever Oscillator Gas Vapor Sensor, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 2 pp, November 30, -0001.
[Abstract] | pdfs//unknown/0279_bedair-0000.pdf This paper is not yet available for download.
135. N. Lazarus and G. Fedder, Preconcentrator-Based Chemical Sensor Stabilization, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 2 pp, November 30, -0001.
[Abstract] | pdfs//unknown/0278_lazarus-0000.pdf This paper is not yet available for download.
136. P. Gilgunn and G. Fedder, Flip-Chip Integrated SOI-CMOS-MEMS Fabrication Technology, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 10-13, November 30, -0001.
[Abstract] | pdfs//unknown/0277_gilgunn-0000.pdf This paper is not yet available for download.
137. S. Bedair and G. Fedder, Controlled Pico-gram material Placement on Suspended Structures Using Solution Wicking, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 272-275, November 30, -0001.
[Abstract] | pdfs//unknown/0276_bedair-0000.pdf This paper is not yet available for download.
138. C. Lo and G. Fedder, Self-Assembled 275nm-Gap Electrodes for CMOS-MEMS Resonators and its Precision DC Charge-Based Capacitance Measurement, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 240-243, November 30, -0001.
[Abstract] | pdfs//unknown/0275_lo-0000.pdf This paper is not yet available for download.
139. G. Fedder and T. Mukherjee, CMOS-MEMS Filters, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 110-113, November 30, -0001.
[Abstract] | pdfs//unknown/0274_fedder-0000.pdf This paper is not yet available for download.
140. J. Liu, M. Noman, J. Bain, T. Schlesinger and G. Fedder, CMOS-MEMS Probes for Reconfigurable IC’s, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 515-518, November 30, -0001.
[Abstract] | pdfs//unknown/0273_liu-0000.pdf This paper is not yet available for download.
141. A. Wung, R. V. Park, J. K. Rebello and G. Fedder, Tri-Axial High-G CMOS-MEMS Capacitive Accelerometer Array, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 876-879., November 30, -0001.
[Abstract] | pdfs//unknown/0272_wung-0000.pdf This paper is not yet available for download.
142. G. Fedder, R. T. Howe, T. K. Liu and E. P. Quevy, Technologies for Co-fabricating MEMS and Electronics, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 306-322, November 30, -0001.
[Abstract] | pdfs//unknown/0269_fedder-0000.pdf This paper is not yet available for download.
143. P. Gilgunn, J. Liu, N. Sarkar and G. Fedder, CMOS-MEMS Lateral Electrothermal Actuators, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 103-114, November 30, -0001.
[Abstract] | pdfs//unknown/0268_gilgunn-0000.pdf This paper is not yet available for download.
144. J. Y. Chen, Y. C. Hsu, S. S. Lee, T. Mukherjee and G. Fedder, Modeling and Simulation of a Condenser Microphone, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 224-230, November 30, -0001.
[Abstract] | pdfs//unknown/0267_chen-0000.pdf This paper is not yet available for download.
145. Y. C. Hsu, J. Y. Chen, T. Mukherjee and G. Fedder, An Optimal Design of High Performance Interface Circuit with Acoustic Transducer Model, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 280-283, November 30, -0001.
[Abstract] | pdfs//unknown/0266_hsu-0000.pdf This paper is not yet available for download.
146. J. Y. Chen, S. S. Lee, P. Chang, C. H. Chu, T. Mukherjee and G. Fedder, A schematic-based design model for microphone and circuit integration, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 157-160, November 30, -0001.
[Abstract] | pdfs//unknown/0265_chen-0000.pdf This paper is not yet available for download.
147. C. Lo and G. Fedder, On-Chip High Quality Factor CMOS-MEMS Silicon-Fin Resonators, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 2449-2452, November 30, -0001.
[Abstract] | pdfs//unknown/0264_lo-0000.pdf This paper is not yet available for download.
148. J. Liu and G. Fedder, Silicon Undercut Characterization in a CMOS-MEMS Process, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 505-508, November 30, -0001.
[Abstract] | pdfs//unknown/0263_liu-0000.pdf This paper is not yet available for download.
149. J. Y. Chen, Y. C. Hsu, T. Mukherjee and G. Fedder, Modeling and Simulation of a Condenser Microphone, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 1299 – 1302, November 30, -0001.
[Abstract] | pdfs//unknown/0262_chen-0000.pdf This paper is not yet available for download.
150. M. E. Karagozler, J. D. Campbell, G. Fedder, S. Goldstein, M. P. Weller and B. W. Yoon, Electrostatic Latching for Inter-module Adhesion, Power Transfer, and Communication in Modular Robots, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 2779-2786, November 30, -0001.
[Abstract] | pdfs//unknown/0261_karagozler-0000.pdf This paper is not yet available for download.
151. S. Bedair and G. Fedder, Polymer Mass Loading of CMOS/MEMS Microslot Cantilever for Gravimetric Sensing, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 1164 - 1167 , November 30, -0001.
[Abstract] | pdfs//unknown/0260_bedair-0000.pdf This paper is not yet available for download.
152. Y. C. Hsu, J. Y. Chen, T. Mukherjee and G. Fedder, A High Performance Interface Circuit with Co-Simulation Platform in MEMS Microphone Design, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 2007, November 30, -0001.
[Abstract] | pdfs//unknown/0259_hsu-0000.pdf This paper is not yet available for download.
153. B. Li, S. Santhanam, L. Schultz, M. Jeffries-EL, M. C. Iovu, G. Sauve, J. Cooper, R. Zhang, J. C. Revelli, A. Kusne, J. L. Snyder, T. Kowalewski, R. D. McCullough, G. Fedder and D. N. Lambeth, Inkjet Printed Chemical Sensor Array-based on Polythiophene Conductive Polymers, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 651-660 Vol. 123 (2), (May 21, 2007), November 30, -0001.
[Abstract] | pdfs//unknown/0258_li-0000.pdf This paper is not yet available for download.
154. R. Hollis, D. O’Hallaron, G. Fedder, N. Sarkar and J. Jones, Vision Guided Pick and Place in a Minifactory Environment, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), November 30, -0001.
[Abstract] | pdfs//unknown/0251_hollis-0000.pdf This paper is not yet available for download.
155. S. Bedair, B. Li, S. Santhanam, R. D. McCullough, D. N. Lambeth and G. Fedder, A CMOS MEMS Gold Plated Electrode Array for Chemical Vapor Detection, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 1074-1077, November 30, -0001.
[Abstract] | pdfs//unknown/0250_bedair-0000.pdf This paper is not yet available for download.
156. B. Li, R. Zhang, G. Sauve, J. Cooper, M. C. Iovu, J. L. Snyder, L. Weiss, G. Fedder and D. N. Lambeth, Nanostructure Dependence of Conductive Polymer Chemical Sensors, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 843 - 846 , November 30, -0001.
[Abstract] | pdfs//unknown/0249_li-0000.pdf This paper is not yet available for download.
157. S. C. Yao, X. Tang, C. C. Hsieh, Y. Alyousef, M. Vladimer, G. Fedder and C. H. Amon, Micro-electro-mechanical systems (MEMS)-based Micro-scale Direct Methanol Fuel Cell Development, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. Vol. 31 (5), (April 2006), pp. 636-649, November 30, -0001.
[Abstract] | pdfs//unknown/0247_yao-0000.pdf This paper is not yet available for download.
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