CMU MEMS Laboratory Publication List

 

 
1. X. Zhu, R. Groves, S. Subbana, D. Jadus, T. Mukherjee and G. Fedder, Micromachined On-Chip Inductor Performance Analysis, in Proceedings of the 16th IEEE International Conference on Microelectromechanical Systems (MEMS '03), pp. 165-168, January 19-23, 2003, Kyoto, Japan.
[Abstract] | Full paper (PDF)
2. X. Zhu, Post-CMOS Micromachining of Surface and Bulk Structures, Ph.D. Thesis, May 2002, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF)
3. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 11, Issue 2, pp. 93-101, April 2002.
[Abstract] | Full paper (PDF)
4. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in IEEE Journal of Solid-State Circuits, Volume 37, Issue 3, pp. 394-403, March 2002.
[Abstract] | Full paper (PDF)
5. H. Luo, X. Zhu, H. Lakdawala, R. Carley and G. Fedder, A copper CMOS-MEMS Z-axis gyroscope, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 631 - 634, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
6. X. Zhu, H. Lakdawala, H. Luo, S. Santhanam, D. Greve and G. Fedder, Copper Interconnect Low-K Dielectric Post-CMOS Micromachining, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
7. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (CICC '01), pp. 579-582, May 6-9, 2001, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
8. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18um Cu Interconnect Low-K CMOS Process, in Proceedings of SRC Techcon (SRC Techcon '00), September 21-23, 2000, Phoenix, AZ, USA.
[Abstract] | Full paper not available from outside CMU
9. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Hilton Head '00), pp. 77-80, June 4-8, 2000, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
10. X. Zhu, D. Greve and G. Fedder, Characterization of Silicon Isotropic Etch by Inductively Coupled Plasma Etch in Post-CMOS Processing, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 568-573, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
11. X. Zhu, D. Greve, R. Lawton, N. Presser and G. Fedder, Factorial Experiment on CMOS-MEMS RIE Post Processing, in 194th Meeting of Electrochemical Society (ECS '98), pp. 33-42, November 1-6, 1998, Boston, MA, USA.
[Abstract] | Full paper not available from outside CMU
12. M. S. Lu, X. Zhu and G. Fedder, Mechanical Property Measurement Of 0.5-µm CMOS Microstructures, in Proceedings of Materials Research Society 1998 Spring Meeting (MRS '98), pp. 27-32, April 13-17, 1998, San Francisco, CA, USA.
[Abstract] | Full paper not available from outside CMU
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