CMU MEMS Laboratory Publication List

 

 
1. H. Luo, G. Zhang, R. Carley and G. Fedder, A Post-CMOS Micromachined Lateral Accelerometer, in IEEE/ASME Journal of Microelectromechanical Systems, pp. 188-195, June 2002.
[Abstract] | Full paper (PDF)
2. G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
3. G. Zhang, Design and Simulation of A CMOS-MEMS Accelerometer, M.S. Thesis, May 1998, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF)
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