CMU MEMS Laboratory Publication List

 

 
1. A. Jain, H. Qu, S. Todd, G. Fedder and H. Xie, Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '04), June 6-10, 2004, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
2. A. Jain, A. Kopa, Y. Pan, G. Fedder and H. Xie, A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography, in IEEE Journal of Selected Topics in Quantum Electronics, Volume 10, Number 3, pp. 636-642, June 2004.
[Abstract] | Full paper (PDF)
3. T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic Optical Coherence Tomography With A Modified Microelectromechanical Systems Mirror For Detection of Bladder Cancers, in Applied Optics, pp. 6422-6426, vol. 42, no. 31, November 2003.
[Abstract] | Full paper not available from outside CMU
4. T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic optical coherence tomography with new MEMS mirror, in Electronics Letters 39, pp. 1535-1536, October 2003.
[Abstract] | Full paper (PDF)
5. H. Xie and G. Fedder, Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope, in IEEE Sensors Journal, pp. 622-631, October 2003.
[Abstract] | Full paper (PDF)
6. A. Jain, T. Xie, Y. Pan, G. Fedder and H. Xie, A Two-Axis Electrothermal SCS Micromirror for Biomedical Imaging, in Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS (Optical MEMS '03), pp. 14-15, August 18-21, 2003, Waikoloa, Hawaii.
[Abstract] | Full paper (PDF)
7. H. Xie, Y. Pan and G. Fedder, A CMOS-MEMS mirror with curled-hinge comb drives, in IEEE/ASME Journal of Microelectromechanical Systems, pp. 450-457, August 2003.
[Abstract] | Full paper (PDF)
8. H. Xie, A. Jain, T. Xie, Y. Pan and G. Fedder, A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications, in Proceedings of CLEO 2003 (CLEO '03), June 1-6, 2003, Baltimore, MD.
[Abstract] | Full paper not available from outside CMU
9. H. Xie and G. Fedder, Integrated microelectromechanical gyroscopes, in Journal of Aerospace Engineering, pp. 65-67, April 2003.
[Abstract] | Full paper not available from outside CMU
10. H. Xie, G. Fedder, Y. Pan and W. Frey, Design and Fabrication of An Integrated CMOS-MEMS 3-Axis Accelerometer, in Technical Proceedings of the Sixth International Conference on Modeling and Simulation of Microsystems Semiconductors, Sensors and Actuators (MSM '03), pp. 292-295, February 24-26, 2003, San Francisco, California.
[Abstract] | Full paper not available from outside CMU
11. H. Xie, Y. Pan and G. Fedder, Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror, in Sensors & Actuators A, pp. 237-241, January 2003.
[Abstract] | Full paper not available from outside CMU
12. H. Xie, G. Fedder, Y. Pan and W. Frey, Phase and Vibration Analysis for a CMOS-MEMS Gyroscope, in International Journal of Nonlinear Sciences and Numerical Simulation, pp. 319-324, vol.3, no. 3-4, August 2002.
[Abstract] | Full paper not available from outside CMU
13. H. Xie and G. Fedder, A DRIE MEMS Gyroscope, in Proceedings of the IEEE Sensors Conference (IEEE Sensors '02), pp. 1413-1418, July 11-14, 2002, Orlando, Florida.
[Abstract] | Full paper (PDF)
14. T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic optical coherence tomography with a micromachined mirror, in Proceedings of the 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology (EMBS-MMB '02), May 2-4, 2002, Madison, Wisconsin.
[Abstract] | Full paper (PDF)
15. H. Xie, Gyroscope and Micromirror Design Using Vertical-Axis CMOS-MEMS Actuation and Sensing, Ph.D. Thesis, May 2002, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF)
16. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 11, Issue 2, pp. 93-101, April 2002.
[Abstract] | Full paper (PDF)
17. H. Xie, Y. Pan and G. Fedder, A SCS CMOS Micromirror for Optical Coherence Tomographic Imaging, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 495-599, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
18. H. Xie and G. Fedder, Vertical Comb-Finger Capacitive Actuation and Sensing for CMOS-MEMS, in Sensors and Actuators A: Physical, Volume 95, Issue 2-3, pp. 212-221, January 2002.
[Abstract] | Full paper not available from outside CMU
19. Y. Pan, H. Xie and G. Fedder, Endoscopic Optical Coherence Tomography based on a Microelectromechanical Mirror, in Optics Letters, Volume 26, Issue 24, pp. 1966-1968, December 2001.
[Abstract] | Full paper not available from outside CMU
20. H. Xie, Y. Pan and G. Fedder, A CMOS-MEMS Micromirror With Large Out-of-Plane Actuation, in Proceedings of 2001 ASME International Mechanical Engineering Congress & Expositon (IMECE '01), November 11-16, 2001, New York, NY, USA.
[Abstract] | Full paper not available from outside CMU
21. F. Chen, H. Xie and G. Fedder, A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control, in IEEE Transactions on Magnetics, Volume 37, Issue 4, pp. 1915-1918, July 2001.
[Abstract] | Full paper (PDF)
22. H. Xie and G. Fedder, A CMOS-MEMS Lateral-axis Gyroscope, in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 162-165, January 21-25, 2001, Interlaken, Switzerland.
[Abstract] | Full paper (PDF)
23. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Hilton Head '00), pp. 77-80, June 4-8, 2000, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF)
24. H. Xie, L. Erdmann, Q. Jing and G. Fedder, Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives, in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM '00), pp. 181-184, March 27-29, 2000, San Diego, CA, USA.
[Abstract] | Full paper not available from outside CMU
25. H. Xie and G. Fedder, A CMOS Z-AXIS CAPACITIVE ACCELEROMETER WITH COMB-FINGER SENSING, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 496-501, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
26. G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
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