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1. |
A. Jain, H. Qu, S. Todd, G. Fedder and H. Xie, Electrothermal SCS Micromirror with Large-Vertical-Displacement Actuation, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '04), June 6-10, 2004, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF) |
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2. |
A. Jain, A. Kopa, Y. Pan, G. Fedder and H. Xie, A Two-Axis Electrothermal Micromirror for Endoscopic Optical Coherence Tomography, in IEEE Journal of Selected Topics in Quantum Electronics, Volume 10, Number 3, pp. 636-642, June 2004.
[Abstract] | Full paper (PDF) |
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3. |
T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic Optical Coherence Tomography With A Modified Microelectromechanical Systems Mirror For Detection of Bladder Cancers, in Applied Optics, pp. 6422-6426, vol. 42, no. 31, November 2003.
[Abstract] | Full paper not available from outside CMU |
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4. |
T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic optical coherence tomography with new MEMS mirror, in Electronics Letters 39, pp. 1535-1536, October 2003.
[Abstract] | Full paper (PDF) |
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5. |
H. Xie and G. Fedder, Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope, in IEEE Sensors Journal, pp. 622-631, October 2003.
[Abstract] | Full paper (PDF) |
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6. |
A. Jain, T. Xie, Y. Pan, G. Fedder and H. Xie, A Two-Axis Electrothermal SCS Micromirror for Biomedical Imaging, in Proceedings of the 2003 IEEE/LEOS International Conference on Optical MEMS (Optical MEMS '03), pp. 14-15, August 18-21, 2003, Waikoloa, Hawaii.
[Abstract] | Full paper (PDF) |
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7. |
H. Xie, Y. Pan and G. Fedder, A CMOS-MEMS mirror with curled-hinge comb drives, in IEEE/ASME Journal of Microelectromechanical Systems, pp. 450-457, August 2003.
[Abstract] | Full paper (PDF) |
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8. |
H. Xie, A. Jain, T. Xie, Y. Pan and G. Fedder, A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications, in Proceedings of CLEO 2003 (CLEO '03), June 1-6, 2003, Baltimore, MD.
[Abstract] | Full paper not available from outside CMU |
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9. |
H. Xie and G. Fedder, Integrated microelectromechanical gyroscopes, in Journal of Aerospace Engineering, pp. 65-67, April 2003.
[Abstract] | Full paper not available from outside CMU |
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10. |
H. Xie, G. Fedder, Y. Pan and W. Frey, Design and Fabrication of An Integrated CMOS-MEMS 3-Axis Accelerometer, in Technical Proceedings of the Sixth International Conference on Modeling and Simulation of Microsystems Semiconductors, Sensors and Actuators (MSM '03), pp. 292-295, February 24-26, 2003, San Francisco, California.
[Abstract] | Full paper not available from outside CMU |
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11. |
H. Xie, Y. Pan and G. Fedder, Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror, in Sensors & Actuators A, pp. 237-241, January 2003.
[Abstract] | Full paper not available from outside CMU |
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12. |
H. Xie, G. Fedder, Y. Pan and W. Frey, Phase and Vibration Analysis for a CMOS-MEMS Gyroscope, in International Journal of Nonlinear Sciences and Numerical Simulation, pp. 319-324, vol.3, no. 3-4, August 2002.
[Abstract] | Full paper not available from outside CMU |
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13. |
H. Xie and G. Fedder, A DRIE MEMS Gyroscope, in Proceedings of the IEEE Sensors Conference (IEEE Sensors '02), pp. 1413-1418, July 11-14, 2002, Orlando, Florida.
[Abstract] | Full paper (PDF) |
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14. |
T. Xie, H. Xie, G. Fedder and Y. Pan, Endoscopic optical coherence tomography with a micromachined mirror, in Proceedings of the 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology (EMBS-MMB '02), May 2-4, 2002, Madison, Wisconsin.
[Abstract] | Full paper (PDF) |
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15. |
H. Xie, Gyroscope and Micromirror Design Using Vertical-Axis CMOS-MEMS Actuation and Sensing, Ph.D. Thesis, May 2002, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF) |
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16. |
H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing for High-Aspect-Ratio Integrated Silicon Microstructures, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 11, Issue 2, pp. 93-101, April 2002.
[Abstract] | Full paper (PDF) |
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17. |
H. Xie, Y. Pan and G. Fedder, A SCS CMOS Micromirror for Optical Coherence Tomographic Imaging, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 495-599, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF) |
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18. |
H. Xie and G. Fedder, Vertical Comb-Finger Capacitive Actuation and Sensing for CMOS-MEMS, in Sensors and Actuators A: Physical, Volume 95, Issue 2-3, pp. 212-221, January 2002.
[Abstract] | Full paper not available from outside CMU |
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19. |
Y. Pan, H. Xie and G. Fedder, Endoscopic Optical Coherence Tomography based on a Microelectromechanical Mirror, in Optics Letters, Volume 26, Issue 24, pp. 1966-1968, December 2001.
[Abstract] | Full paper not available from outside CMU |
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20. |
H. Xie, Y. Pan and G. Fedder, A CMOS-MEMS Micromirror With Large Out-of-Plane Actuation, in Proceedings of 2001 ASME International Mechanical Engineering Congress & Expositon (IMECE '01), November 11-16, 2001, New York, NY, USA.
[Abstract] | Full paper not available from outside CMU |
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21. |
F. Chen, H. Xie and G. Fedder, A MEMS-Based Monolithic Electrostatic Microactuator for Ultra-Low Magnetic Disk Head Fly Height Control, in IEEE Transactions on Magnetics, Volume 37, Issue 4, pp. 1915-1918, July 2001.
[Abstract] | Full paper (PDF) |
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22. |
H. Xie and G. Fedder, A CMOS-MEMS Lateral-axis Gyroscope, in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 162-165, January 21-25, 2001, Interlaken, Switzerland.
[Abstract] | Full paper (PDF) |
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23. |
H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures, in Technical Digest of the Solid-State Sensor and Actuator Workshop (Hilton Head '00), pp. 77-80, June 4-8, 2000, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF) |
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24. |
H. Xie, L. Erdmann, Q. Jing and G. Fedder, Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives, in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM '00), pp. 181-184, March 27-29, 2000, San Diego, CA, USA.
[Abstract] | Full paper not available from outside CMU |
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25. |
H. Xie and G. Fedder, A CMOS Z-AXIS CAPACITIVE ACCELEROMETER WITH COMB-FINGER SENSING, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 496-501, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF) |
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26. |
G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF) |
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