CMU MEMS Laboratory Publication List


1. S. Vemuri, Behavioral Modeling of Viscous Damping in MEMS, M.S. Thesis, August 2000, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF)
2. S. Vemuri, G. Fedder and T. Mukherjee, Low-Order Squeeze Film Model for Simulation of MEMS Devices, in Technical Proceedings of the Third International Conference on Modeling and Simulation of Microsystems (MSM '00), pp. 205-208, March 27-29, 2000, San Diego, CA, USA.
[Abstract] | Full paper not available from outside CMU
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