CMU MEMS Laboratory Publication List

 

 
1. H. Luo, G. Fedder and R. Carley, Integrated Multiple-Device IMU Systems with Continuous-Time Sensing Circuitry, in Proceedings of the IEEE International Solid-State Circuits Conference (ISSCC '03), pp. 2 pages, February 9-13, 2003, San Francisco, California.
[Abstract] | Full paper (PDF)
2. H. Luo, Integrated Multiple Device CMOS-MEMS IMU Systems and RF MEMS Applications, Ph.D. Thesis, December 2002, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF)
3. H. Luo, G. Zhang, R. Carley and G. Fedder, A Post-CMOS Micromachined Lateral Accelerometer, in IEEE/ASME Journal of Microelectromechanical Systems, pp. 188-195, June 2002.
[Abstract] | Full paper (PDF)
4. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in IEEE Journal of Solid-State Circuits, Volume 37, Issue 3, pp. 394-403, March 2002.
[Abstract] | Full paper (PDF)
5. H. Luo, X. Zhu, H. Lakdawala, R. Carley and G. Fedder, A copper CMOS-MEMS Z-axis gyroscope, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 631 - 634, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
6. X. Zhu, H. Lakdawala, H. Luo, S. Santhanam, D. Greve and G. Fedder, Copper Interconnect Low-K Dielectric Post-CMOS Micromachining, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
7. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (CICC '01), pp. 579-582, May 6-9, 2001, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
8. H. Luo, G. Fedder and R. Carley, An Elastically Gimbaled Z-Axis CMOS-MEMS Gyroscope, in Proceedings of International Symposium on Smart Structures and Microsystems 2000 (IS3M '00), pp. 1-6, October 19-21, 2000, Hong Kong.
[Abstract] | Full paper (PDF)
9. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18um Cu Interconnect Low-K CMOS Process, in Proceedings of SRC Techcon (SRC Techcon '00), September 21-23, 2000, Phoenix, AZ, USA.
[Abstract] | Full paper not available from outside CMU
10. Q. Jing, H. Luo, T. Mukherjee, R. Carley and G. Fedder, CMOS Micromechanical Bandpass Filter Design Using a Hierarchical MEMS Circuit Library, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 187-192, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
11. H. Luo, G. Fedder and R. Carley, A 1 mG LATERAL CMOS-MEMS ACCELEROMETER, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 502-507, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
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