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M. S. Lu and G. Fedder, Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage, in IEEE/ASME Journal of Microelectromechanical Systems, Volume 13, Issue 2, pp. 759-769, October 2004.
[Abstract] | Full paper (PDF) |
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M. S. Lu and G. Fedder, Closed-Loop Control of a Parallel-Plate Microactuator Beyond the Pull-In Limit, in Technical Digest of the Solid-State Sensor, Actuator and Microsystems Workshop (Hilton Head '02), pp. 255-258, June 2-4, 2002, Hilton Head Island, SC, USA.
[Abstract] | Full paper (PDF) |
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M. S. Lu, Parallel-Plate Micro Servo for Probe-Based Data Storage, Ph.D. Thesis, May 2002, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF) |
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R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU |
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M. S. Lu and G. Fedder, Parameterized Electrostatic Gap Models for Structured Design of Microelectromechanical Systems, in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM '99), pp. 280-283, April 19-21, 1999, San Juan, PR, USA.
[Abstract] | Full paper not available from outside CMU |
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M. S. Lu, X. Zhu and G. Fedder, Mechanical Property Measurement Of 0.5-µm CMOS Microstructures, in Proceedings of Materials Research Society 1998 Spring Meeting (MRS '98), pp. 27-32, April 13-17, 1998, San Francisco, CA, USA.
[Abstract] | Full paper not available from outside CMU |
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G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Sensors & Actuators A, vol. 57, no.2, pp. 103-110, November 1996.
[Abstract] | Full paper not available from outside CMU |
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8. |
G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Technical Digest of the 9th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '96), pp. 13-18, February 15-17, 1996, San Diego, CA, USA.
[Abstract] | Full paper (PDF) |
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