CMU MEMS Laboratory Publication List

 

 
1. H. Lakdawala and G. Fedder, Temperature stabilization of CMOS capacitive accelerometers, in Journal Of Micromechanics And Microengineering, Volume 14, Number 4, pp. 559-566, April 2004.
[Abstract] | Full paper not available from outside CMU
2. S. V. Iyer, H. Lakdawala, T. Mukherjee and G. Fedder, Modeling Methodology for a CMOS-MEMS Electrostatic Comb, in Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP '02), pp. 114-125, May 6-8, 2002, Cannes, France.
[Abstract] | Full paper not available from outside CMU
3. H. Lakdawala, Temperature Control of CMOS Micromachined Sensors, Ph.D. Thesis, April 2002, Carnegie Mellon University, Pittsburgh, PA.
[Abstract] | Full paper (PDF)
4. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in IEEE Journal of Solid-State Circuits, Volume 37, Issue 3, pp. 394-403, March 2002.
[Abstract] | Full paper (PDF)
5. H. Luo, X. Zhu, H. Lakdawala, R. Carley and G. Fedder, A copper CMOS-MEMS Z-axis gyroscope, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 631 - 634, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
6. H. Lakdawala and G. Fedder, Temperature control of CMOS micromachined sensors, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 324-327, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
7. X. Zhu, H. Lakdawala, H. Luo, S. Santhanam, D. Greve and G. Fedder, Copper Interconnect Low-K Dielectric Post-CMOS Micromachining, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
8. H. Lakdawala and G. Fedder, CMOS Micromachined Infrared Imager Pixel, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
9. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (CICC '01), pp. 579-582, May 6-9, 2001, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
10. S. V. Iyer, H. Lakdawala, G. Fedder and T. Mukherjee, Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams, in Technical Proceedings of the Fourth International Conference on Modeling and Simulation of Microsystems (MSM '01), pp. 88-91, March 19-21, 2001, Hilton Head, SC, USA.
[Abstract] | Full paper not available from outside CMU
11. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18um Cu Interconnect Low-K CMOS Process, in Proceedings of SRC Techcon (SRC Techcon '00), September 21-23, 2000, Phoenix, AZ, USA.
[Abstract] | Full paper not available from outside CMU
12. H. Lakdawala and G. Fedder, Analysis Of Temperature-dependent Residual Stress Gradients In CMOS Micromachined Structures, in Proceedings of 10th International Conference on Solid State Sensors and Actuators (TRANSDUCERS '99), pp. 526-529, June 7-10, 1999, Sendai, Japan.
[Abstract] | Full paper not available from outside CMU
13. H. Lakdawala, B. Baidya, T. Mukherjee and G. Fedder, Intelligent Automatic Meshing Of Multilayer CMOS Micromachined Structures For Finite Element Analysis, in Technical Proceedings of the Second International Conference on Modeling and Simulation of Microsystems (MSM '99), pp. 297-300, April 19-21, 1999, San Juan, PR, USA.
[Abstract] | Full paper not available from outside CMU
Your request returns 13 results.


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