CMU MEMS Laboratory Publication List

 

 
1. R. Carley, R. T. El-Sayed, D. F. Guillou, J. F. Alfaro, G. Fedder, S. Schlosser, D. Nagle, G. Ganger and J. Bain, MEMS memory elements, in Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS '01), pp. 1-5, November 7-8, 2001, San Diego CA.
[Abstract] | Full paper not available from outside CMU
2. D. F. Guillou, S. Santhanam and R. Carley, Laminated, Sacrificial-Poly MEMS Technology in Standard CMOS, in Sensors and Actuators A: Physical, pp. 346-355, August 2000.
[Abstract] | Full paper not available from outside CMU
3. R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU
4. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Sensors & Actuators A, vol. 57, no.2, pp. 103-110, November 1996.
[Abstract] | Full paper not available from outside CMU
5. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Technical Digest of the 9th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '96), pp. 13-18, February 15-17, 1996, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
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