CMU MEMS Laboratory Publication List |
1. | R. Carley, R. T. El-Sayed, D. F. Guillou, J. F. Alfaro, G. Fedder, S. Schlosser, D. Nagle, G. Ganger and J. Bain, MEMS memory elements, in Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS '01), pp. 1-5, November 7-8, 2001, San Diego CA.
[Abstract] | Full paper not available from outside CMU |
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2. | D. F. Guillou, S. Santhanam and R. Carley, Laminated, Sacrificial-Poly MEMS Technology in Standard CMOS, in Sensors and Actuators A: Physical, pp. 346-355, August 2000.
[Abstract] | Full paper not available from outside CMU |
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3. | R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU |
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4. | G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Sensors & Actuators A, vol. 57, no.2, pp. 103-110, November 1996.
[Abstract] | Full paper not available from outside CMU |
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5. | G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Technical Digest of the 9th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '96), pp. 13-18, February 15-17, 1996, San Diego, CA, USA.
[Abstract] | Full paper (PDF) |
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