B. M. Diamond, J. Neumann and K. Gabriel, Digital Sound Reconstruction Using Arrays of CMOS-MEMS Microspeakers, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 292-295, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
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