|CMU MEMS Laboratory Publication List|
|1.||G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
|This page was generated in 1.253864 seconds at 10:17:01 am EDT on 01 Oct 2014.|
overview | projects | people | publications | intranet | resources © 1998-2009 Carnegie Mellon