|CMU MEMS Laboratory Publication List|
|1.||G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
|This page was generated in 0.205797 seconds at 06:29:50 pm EDT on 25 Jun 2017.|
overview | projects | people | publications | intranet | resources © 1998-2009 Carnegie Mellon