CMU MEMS Laboratory Publication List |
1. | G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF) |
This page was generated in 0.154139 seconds at 03:03:31 pm UTC on 28 Mar 2024. | |
overview | projects | people | publications | intranet | resources © 1998-2009 Carnegie Mellon |