|
|||||||
|
|
|
|
|
|
||
 |
CMU MEMS Laboratory Publication List |
|
1. |
G. Zhang, H. Xie, L. E. deRosset and G. Fedder, A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation, in Technical Digest of the 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606-611, January 17-21, 1999, Orlando, FL, USA.
[Abstract] | Full paper (PDF) |
|
This page was generated in
0.23077 seconds at 04:51:09 am EDT on 07 Jun 2013. |
|
overview | projects | people | publications | intranet | resources © 1998-2009 Carnegie Mellon |