CMU MEMS Laboratory Publication List

 

 
1. J. Wu, G. Fedder and R. Carley, A Low-Noise Low-Offset Capacitive Sensing Amplifier for a 50-μg/ÖHz Monolithic CMOS MEMS Accelerometer, in IEEE Journal of Solid-State Circuits, Volume 39, Issue 21, pp. 722-730, May 2004.
[Abstract] | Full paper (PDF)
2. H. Luo, G. Fedder and R. Carley, Integrated Multiple-Device IMU Systems with Continuous-Time Sensing Circuitry, in Proceedings of the IEEE International Solid-State Circuits Conference (ISSCC '03), pp. 2 pages, February 9-13, 2003, San Francisco, California.
[Abstract] | Full paper (PDF)
3. H. Luo, G. Zhang, R. Carley and G. Fedder, A Post-CMOS Micromachined Lateral Accelerometer, in IEEE/ASME Journal of Microelectromechanical Systems, pp. 188-195, June 2002.
[Abstract] | Full paper (PDF)
4. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in IEEE Journal of Solid-State Circuits, Volume 37, Issue 3, pp. 394-403, March 2002.
[Abstract] | Full paper (PDF)
5. J. Wu, G. Fedder and R. Carley, A Low-Noise Low-Offset Chopper-Stabilized Capacitive-Readout Amplifier for CMOS MEMS Accelerometers, in Proc. of the IEEE International Solid-State Circuits Conference (ISSCC '02), pp. 428-429, 478, February 4-6, 2002, San Francisco, California.
[Abstract] | Full paper (PDF)
6. H. Luo, X. Zhu, H. Lakdawala, R. Carley and G. Fedder, A copper CMOS-MEMS Z-axis gyroscope, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 631 - 634, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF)
7. R. Carley, R. T. El-Sayed, D. F. Guillou, J. F. Alfaro, G. Fedder, S. Schlosser, D. Nagle, G. Ganger and J. Bain, MEMS memory elements, in Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS '01), pp. 1-5, November 7-8, 2001, San Diego CA.
[Abstract] | Full paper not available from outside CMU
8. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (CICC '01), pp. 579-582, May 6-9, 2001, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
9. J. Wu and R. Carley, Table-Based Numerical Macromodeling for MEMS Devices, in Technical Proceedings of the Fourth International Conference on Modeling and Simulation of Microsystems (MSM '01), pp. 579-582, March 19-21, 2001, Hilton Head, SC, USA.
[Abstract] | Full paper not available from outside CMU
10. H. Luo, G. Fedder and R. Carley, An Elastically Gimbaled Z-Axis CMOS-MEMS Gyroscope, in Proceedings of International Symposium on Smart Structures and Microsystems 2000 (IS3M '00), pp. 1-6, October 19-21, 2000, Hong Kong.
[Abstract] | Full paper (PDF)
11. J. Wu and R. Carley, A Table-Based Time-Domain Simulation Method for Oversampled Microelectromechanical Systems, in Proceedings of 2000 IEEE/ACM/VIUF Intl. Workshop on Behavioral Modeling and Simulation (BMAS '00), pp. 37-41, October 19-20, 2000, Orlando, FL, USA.
[Abstract] | Full paper (PDF)
12. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18um Cu Interconnect Low-K CMOS Process, in Proceedings of SRC Techcon (SRC Techcon '00), September 21-23, 2000, Phoenix, AZ, USA.
[Abstract] | Full paper not available from outside CMU
13. T. Mukherjee, R. Carley and R. A. Rutenbar, Efficient Handling of Operating Range and Manufacturing Line Variations in Analog Cell Synthesis, in IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, pp. 825-839, Vol. 19, No. 8, September 2000.
[Abstract] | Full paper (PDF)
14. D. F. Guillou, S. Santhanam and R. Carley, Laminated, Sacrificial-Poly MEMS Technology in Standard CMOS, in Sensors and Actuators A: Physical, pp. 346-355, August 2000.
[Abstract] | Full paper not available from outside CMU
15. R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU
16. Q. Jing, H. Luo, T. Mukherjee, R. Carley and G. Fedder, CMOS Micromechanical Bandpass Filter Design Using a Hierarchical MEMS Circuit Library, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 187-192, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
17. H. Luo, G. Fedder and R. Carley, A 1 mG LATERAL CMOS-MEMS ACCELEROMETER, in Proceedings of the 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 502-507, January 23-27, 2000, Miyazaki, Japan.
[Abstract] | Full paper (PDF)
18. E. Ochotta, T. Mukherjee, R. A. Rutenbar and R. Carley, Practical Synthesis of High Performance Analog Circuits, Kluwer Academic Publishers, ISBN 0792382374, November 1998.
[Abstract] | Full paper not available from outside CMU
19. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Sensors & Actuators A, vol. 57, no.2, pp. 103-110, November 1996.
[Abstract] | Full paper not available from outside CMU
20. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Technical Digest of the 9th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '96), pp. 13-18, February 15-17, 1996, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
21. R. Carley and T. Mukherjee, High-speed Low-Power Integrating CMOS Sample-and-Hold Amplifier Architecture, in Proceedings of the IEEE 1995 Custom Integrated Circuits Conference (CICC '95), pp. 543-546, May 1-4, 1995, Santa Clara, CA, USA.
[Abstract] | Full paper (PDF)
22. T. Mukherjee, R. Carley and R. A. Rutenbar, Synthesis of Manufacturable Analog Circuits, in Technical Digest of the ACM/IEEE International Confer­ence on Computer Aided Design (ICCAD '94), pp. 586-593, November 6-10, 1994, San Jose, California.
[Abstract] | Full paper (PDF)
23. T. Mukherjee and R. Carley, Rapid Yield Estimation as a Computer Aid for Analog Circuit Design, in IEEE Journal of Solid-State Circuits, Volume 26, No. 3, March 1991.
[Abstract] | Full paper (PDF)
24. T. Mukherjee and R. Carley, Rapid Yield Estimation as a Computer Aid for Analog Circuit Design, in Proceedings of the IEEE 1990 Custom Integrated Circuits Conference (CICC '90), pp. 8.5.1-4, May 13-16, 1990, Boston, MA, USA.
[Abstract] | Full paper (PDF)
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