CMU MEMS Laboratory Publication List

 

 
1. B. Li, G. Sauve, M. C. Iovu, M. Jeffries-EL, R. Zhang, J. Cooper, S. Santhanam, L. Schultz, J. C. Revelli, A. Kusne, T. Kowalewski, J. L. Snyder, L. Weiss, G. Fedder, R. D. McCullough and D. N. Lambeth, Volatile Organic Compound Detection Using Nanostructured Copolymers, in Nano Letters Vol. 6 (8), (2006), pp. 1598-1602, October 2006.
[Abstract] | Full paper not available from outside CMU
2. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in IEEE Journal of Solid-State Circuits, Volume 37, Issue 3, pp. 394-403, March 2002.
[Abstract] | Full paper (PDF)
3. X. Zhu, H. Lakdawala, H. Luo, S. Santhanam, D. Greve and G. Fedder, Copper Interconnect Low-K Dielectric Post-CMOS Micromachining, in Technical Digest of the 11th International Conference on Solid-State Sensors and Actuators (TRANSDUCERS '01), pp. 1548-1551, June 10-14, 2001, Munich, Germany.
[Abstract] | Full paper not available from outside CMU
4. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18 µm Cu Interconnect Low-K CMOS, in Proceedings of the IEEE 2001 Custom Integrated Circuits Conference (CICC '01), pp. 579-582, May 6-9, 2001, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
5. H. Lakdawala, X. Zhu, H. Luo, S. Santhanam, R. Carley and G. Fedder, Micromachined High-Q Inductors in 0.18um Cu Interconnect Low-K CMOS Process, in Proceedings of SRC Techcon (SRC Techcon '00), September 21-23, 2000, Phoenix, AZ, USA.
[Abstract] | Full paper not available from outside CMU
6. D. F. Guillou, S. Santhanam and R. Carley, Laminated, Sacrificial-Poly MEMS Technology in Standard CMOS, in Sensors and Actuators A: Physical, pp. 346-355, August 2000.
[Abstract] | Full paper not available from outside CMU
7. R. Carley, J. Bain, G. Fedder, D. Greve, D. F. Guillou, M. S. Lu, T. Mukherjee, S. Santhanam, L. Abelmann and S. Min, Single-Chip Computers with Microelectromechanical Systems-Based Magnetic Memory, in Journal of Applied Physics, Volume 87, Issue 9, pp. 6680-6685, May 2000.
[Abstract] | Full paper not available from outside CMU
8. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Sensors & Actuators A, vol. 57, no.2, pp. 103-110, November 1996.
[Abstract] | Full paper not available from outside CMU
9. G. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S. Lu and R. Carley, Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process, in Technical Digest of the 9th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS '96), pp. 13-18, February 15-17, 1996, San Diego, CA, USA.
[Abstract] | Full paper (PDF)
10. G. Fedder, D. T. Barkand, S. Bedair, N. Garg, J. Greenblatt, R. Jin, D. N. Lambeth, N. Lazarus, T. R. Rozzi, S. Santhanam, L. Schultz, J. L. Snyder, L. Weiss and J. Wu, Jetted Nanoparticle Chemical Sensor Circuits for Respirator End-of-Service-Life Detection, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 2 pp, November 30, -0001.
[Abstract] | pdfs//unknown/0280_fedder-0000.pdf This paper is not yet available for download.
11. B. Li, S. Santhanam, L. Schultz, M. Jeffries-EL, M. C. Iovu, G. Sauve, J. Cooper, R. Zhang, J. C. Revelli, A. Kusne, J. L. Snyder, T. Kowalewski, R. D. McCullough, G. Fedder and D. N. Lambeth, Inkjet Printed Chemical Sensor Array-based on Polythiophene Conductive Polymers, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 651-660 Vol. 123 (2), (May 21, 2007), November 30, -0001.
[Abstract] | pdfs//unknown/0258_li-0000.pdf This paper is not yet available for download.
12. S. Bedair, B. Li, S. Santhanam, R. D. McCullough, D. N. Lambeth and G. Fedder, A CMOS MEMS Gold Plated Electrode Array for Chemical Vapor Detection, in PUBLICATION NAME NOT AVAILABLE (Unknown '00), pp. 1074-1077, November 30, -0001.
[Abstract] | pdfs//unknown/0250_bedair-0000.pdf This paper is not yet available for download.
Your request returns 12 results.


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