CMU MEMS Laboratory Publication List |
1. | J. Neumann and K. Gabriel, CMOS-MEMS Acoustic Devices, CMOS-MEMS, Wiley-VCH, ISBN 3257310800, pp. 193-224, January 2005.
[Abstract] | Full paper not available from outside CMU |
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2. | J. Neumann, D. Greve and I. J. Oppenheim, Comparison of Piezoresistive and Capacitive Ultrasonic Transducers, in SPIE Symposium on Smart Structures & Materials/NDE 2004 (Smart Structures 2004 '04), March 14-18, 2004, San Diego, CA.
[Abstract] | Full paper not available from outside CMU |
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3. | J. Neumann, MEMS (Microelectromechanical Systems) Audio Devices – Dreams and Realities, in Audio Engineering Society 115th Convention (AES 115 '03), pp. paper 5888, October 10-13, 2003, New York, New York.
[Abstract] | Full paper not available from outside CMU |
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4. | D. Greve, J. Neumann, I. J. Oppenheim, S. P. Pessiki and D. Ozevin, Robust Capacitive MEMS Ultrasonic Transducers for Liquid Immersion, in Proceedings of the 2003 IEEE International Ultrasonics Symposium (UFFC-S '03), October 5-8, 2003, Honolulu, Hawaii.
[Abstract] | Full paper (PDF) |
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5. | J. Neumann and K. Gabriel, A Fully-Integrated CMOS-MEMS Audio Microphone, in The 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '03), pp. 230-233, June 8-12, 2003, Boston, Massachusetts.
[Abstract] | Full paper (PDF) |
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6. | B. M. Diamond, J. Neumann and K. Gabriel, Digital Sound Reconstruction Using Arrays of CMOS-MEMS Microspeakers, in Technical Digest of the 15th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '02), pp. 292-295, January 20-24, 2002, Las Vegas, NV, USA.
[Abstract] | Full paper (PDF) |
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7. | J. Neumann and K. Gabriel, CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation, in Sensors and Actuators A: Physical, Volume 95, Issue 2-3, pp. 175-182, January 2002.
[Abstract] | Full paper not available from outside CMU |
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8. | J. Neumann and K. Gabriel, CMOS-MEMS Membrane for Audio-Frequency Acoustic Actuation, in Technical Digest of the 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 236-239, January 21-25, 2001, Interlaken, Switzerland.
[Abstract] | Full paper (PDF) |
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