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MUMPS Extraction Module

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Extraction Research Focus
Input Layout

Extraction Research Focus
Extracted Layout


Surface micromachined microelectromechanical systems (MEMS) integrating multi-domain sensors and actuators with conventional microelectronic batch fabrication processes are becoming increasingly complex. In order to design systems with large numbers of multi-domain components, we need to use a hierarchical structured design approach, with design at the schematic level instead of the traditional layout representation used in MEMS design. However, since fabrication can only be done from a layout representation, an automatic or manual layout generation from schematic is necessary. It is essential to be able to translate from the layout representation back to the schematic to reason about layout correctness in meeting the schematic's function as well as to extract geometric parameters for functional simulation. An extraction module is developed which reads in the geometric description of the layout structure and reconstructs the corresponding schematic. This schematic can then be fed to an ordinary differential equation solver or can be compared with the design schematic to validate the correctness of the designed layout. The extraction module also minimizes the number of nodes required to represent the schematic as a netlist.

Our approach to MEMS extraction involves three steps. In the first step we read in the layout and create a unique representation (called canonical representation). We then consider each element in the canonical representation, and on the basis of size, shape, and interconnectivity, determine its function. Using these elements as seeds, we iteratively consider the remaining elements that have not yet been identified. Eventually, we merge neighboring elements that share the same function to minimize the number of elements and nodes in the extracted MEMS layout. This is then translated into a netlist, and can be solved via lumped parameter simulation.

Listed below are few cif files which can be used for demonstration.


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