Canonical Design Problem
High Q Resonator

Goals And Objectives

• Test evolving tools in the DARPA Composite CAD Program
• Why use Folded Flexure Resonator for High Q Canonical Problem ?
• A well-understood MEMS device 
• Several levels of Abstraction Possible 
• Finite-element 
• Modular lumped-parameter 
• Analytical (flat device-level lumped-parameter) 
• Therefore can base-line several tools 
• Experimental Results available 

Approach

• Use several similar resonators 
• Resonators were synthesized via Microresonator Synthesis Module for 3kHz, 10kHz, 20kHz, 30kHz, 100kHz, 300kHz. 
• Models based on Finite Element, Lumped Parameters, and Analytical Equations were developed for these resonators
• CIF Files available 
• 3D finite element analysis available 
• Flexure Stiffness 
• Dominant mode, Secondary modes 
• 3D Analytical Models available 
• Flexure Stiffness 
• Dominant mode, Secondary modes 
• 2D Modular Lumped-Parameter Analysis available 
• Flexure Stiffness 
• Dominant mode, Secondary modes 
• Comparison 
• Comparison of the results from 3D finite element analysis, 3D analytical models and 2D modular lumped-parameter analysis 
• Experimental data available 
• Resonant Frequency 
• Quality Factor