Z-axis CMOS-MEMS gyroscope
International Symposium on Smart Structure and System (IS3M), Oct. 19-23, 2000, HongKong
Gyroscope is another key element in Inertial Measurement Unit (IMU) system. It can sense the rotation rate. The CMOS-MEMS gyroscope is integrated into a conventional CMOS chip. Such system could be as low cost and reliable as the silicon chips.
Key word CMOS-MEMS, gyroscope
Background info CMOS-MEMS process
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This photo shows the first generation Z-axis CMOS-MEMS gyroscope fabricated at CMU. The size of device is about 350um by 550um. This vertical gyroscope consists of an accelerometer core and an outer vibration rigid frame. The theory is based on the detecting of the Coriolis force. The whole device is anchored on the substrate. The electronics are integrated on the same substrate (not shown in this picture). |
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This photo shows the device under test. The gyroscope test board is mounted on a rate table to calibrate its performance. |
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The waveforms captured at different stage on the board. It illustrates the Coriolis force modulation. The equivalent noise floor is 0.03 deg/sec/sqrt(Hz). |
| still under construction | |
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The goal of this project is to make an integrated IMU system which includes accelerometer and gyroscope and has six degree-of-freedom sensing ability.
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