CMOS-MEMS Filter
IEEE MEMS 2000, Jan 23-27 2000 Miyazaki Japan
As a partner of this project, I worked with another student, Jing, at CMU to verfy the MEMS-spice NODAS. My part of this job is to design and test this filter.
Key word CMOS-MEMS, filter
Background info CMOS-MEMS process
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This photo shows the second generation CMOS-MEMS accelerometer fabricated at CMU. The size of device is about 320um by 420um and it weighs only about 0.4ug ! This lateral accelerometer consists of proof-mass (middle) and serpentine springs at the two ends of the proof-mass. The latice structures are the release holes to make sure the silicon underneath can be etched away. The whole device is anchored on the substrate. The electronics are integrated on the same substrate (not shown in this picture). |
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This photo shows the device under test. The accelerometer test board is mounted on a vabration table to calibrate its performance. |
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The spectrum of the output from the acceleromenter. The equivalent noise floor is 1mG/sqrt(Hz). |
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This picture illustrates assemble of this accelerometer. |
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The goal of this project is to make an integrated IMU system which includes accelerometer and gyroscope and has six degree-of-freedom sensing ability.
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