SRC Copper Design Competition 

• Key word CMOS-MEMS, copper, RF, inductor

• Background info CMOS-MEMS process

In the year 2000, I joined the CMU team to participated the SRC copper design competition.  Our design is  to combine our CMOS-MEMS technology with the UMC 0.18um copper process to fabricate a high-Q RF inductor. After three months hard working with the other partners, Xu Zhu, Hasnain Lakdawala and our advisors, Gary. K. Fedder, we made in top five among the 25 university teams all over the country. And in the final phase two we got the third prize of this competition. We would also thank the Novellus company, SRC group and the UMC for funding this competition.

	This photo shows the copper inductor coil released by the CMOS-MEMS process. Our next step is to design a mechanical adjustable VCO.
	contest prize

The goal of this project is to make a high-Q VCO in the range of 2-3GHz.  

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