References


W.C. Tang, T.-C.H. Nquyen, and R.T. Howe. "Latterally driven polysilicon resonant microstructures," In Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Salt Lake City, Utah, February 1989, pp. 53-59.

M. W.Judy, Micromechanics using sidewall beams, PhD thesis, Dept. of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, California, May 1994.

W.C. Tang, Electrostatic comb drive for resonant sensor and actuator applications, PhD thesis, Dept. of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, California, November 1990.

Z.L. Zhang and N. MacDonald, "An RIE process for submicron, silicon electromechanical structures," In Technical Digest, 6th Inter. Conf. on Solid-State Sensors and Actuators (Transducers '91), San Francisco, California, June 1991, pp. 520-523.

V.P. Jaecklin, C. Linder, and N.F de Rooij, "Optical microshutters and torsional micromirrors of light modulator array" In Proceedings, IEEE Micro Electro Mechanical Systems Workshop, Fort Lauderdale, Florida, February 1993, pp. 124-127.

A.P. Pisano and Y.-H. Cho, "Mechanical design issues in laterally-driven microsturctures," In Technical Digest, 5th Inter. Conf. on Solid_State Sensors and Actuators (Transducers '89), Montreax, Switzlerland, June 1989, pp. 1060-1064



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