The Microelectromechanical Systems (MEMS) Laboratory is associated jointly with the Department of Electrical and Computer Engineering, The Robotics Institute (part of the School of Computer Science), and the Institute for Complex Engineered Systems at Carnegie Mellon University.
In the MEMS Laboratory, we are developing miniature sensor and actuator systems made using batch-fabrication processes, especially integrated-circuit fabrication processes. Research in this area is motivated by the potential to produce high-performance, low-cost, miniature sensors and actuators. Smart sensors are made by combining microstructures and circuits on a single silicon chip. Specific research areas of interest include nanometer-scale data storage, microsensors and microactuators, MEMS design tools, micromechanical component modeling, embedded microinstruments, and microrobotics.
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