
	Links

		A comprehensive list of WWW servers and useful information related to MEMS fields are provided by the Information Sciences Institute MEMS Clearinghouse Calendar of MEMS Conferences Want to build your own MEMS devices, but don't have a $10-million fabrication facility? Here are the MEMS process services available to make your device: Poly, SOI and Metal Multi-User MEMS Process Service (MUMPs), Cronos Sandia Agile MEMS Prototyping, Layout tools, and Education (SAMPLE) program, Sandia National Laboratories MOS Implementation Service (MOSIS), now partially supports MEMS structures National Nanofabrication Users Network (Stanford/UCSB/Cornell/Penn State/Howard) CMP, France (the European MOSIS) CNRI MEMS Exchange - Custom MEMS process services sponsored by The Corporation for National Research Initiatives (CNRI) So, you have a great idea and want to get the U.S. government to pay for it? Check out the following links: DARPA/MTO MEMS - The MEMS Program of the Defense Advanced Research Projects Agency (DARPA), Microsystems Technology Office (MTO) NIST/ATP - National Institute of Stndards and Technology (NIST) Advanced Technology Program (ATP) Here are Web pages with an accumulation of information about MEMS and general semiconductor technology. The MEMS Clearinghouse, MEMS-Exchange World's smallest guitar (at Cornell) JTEC panel report on MEMS in Japan The Semiconductor Subway, M.I.T. Here's a list of university programs in MEMS (not guaranteed to be comprehensive!): Microelectromechanical Systems Laboratory, Carnegie Mellon University Berkeley Sensor & Actuator Center, U. C. Berkeley M.I.T. Switch survey U.C.L.A. Cornell MEMS Laboratory C.W.R.U. Stanford Delft Microsystem Booklist at Delft Microoptics at Delft The Microsystems Group, Department of Microengineering (DMT) of the Swiss Federal Institute of Technology (EPFL) VDI/VDE Technologiezentrum Informationstechnik GmbH (at present, cannot connect to this site...) MEMS at KTH (Royal Institute of Technology), in Kista - just outside of Stockholm Sensor Technology at LLNL (Lawrence Livermore National Laboratory) University Computer-Aided Design tools for MEMS: MEMCAD, M.I.T. CAEMEMS, University of Michigan MEMS Design Automation at CalTech Bart Romanowicz, PhD Thesis, "Methodology for the modeling and simulation of microsystems," EPFL, July 1997. Commercial Computer-Aided Design tools for MEMS: MEMCAD - Microcosm Technologies' 3D modeling and simulation for MEMS MEMS Pro - Tanner Tools schematic, simulation and layout framework for MEMS IntelliSense (IntelliCAD 3D modeling and simulation for MEMS) CFDRC MEMS - CFD Research Corporation's 3D modeling and simulation for MEMS SIMODE (Simulation of Orientation Dependent Etching) Other CMU resource advice pages describing tools, tips, and opinions on how to be an efficient researcher at CMU: ECE Resources: http://ece.cmu.edu/insider SCS Resources: http://www.cs.cmu.edu/insiders.html RI-VASC Resource page: http://vasc.ri.cmu.edu/intranet/advice