CMOS MEMS Mask Making using DWL 66

• Chip preparation for DWL Lithography
• Mask Generation for DWL Lithography
• Chip front-side procedures for DWL Lithography
• DWL FAQ
• Rule files for mask generation can be found in
  /afs/ece/usr/mems/cadence/{jazz,tsmc}/cmosmemsmask.rul

Mask Making

• Mask Vendors : 
  • Photo Sciences Inc. 
  • Adtek Photomask

• How to make Postscript Photomasks (Mark Mescher) This is also a reasonable way to get postscript for figures from your cif layout.

Bonding

• Suggestions for die bonding (Thanks to Bambi Brewer for compiling a list).

Information regarding process-specific Physical Design Kits has been moved to a separate page for convenience.