Design
   
   

 

Pointers

Layout Tools

  • Cadence - We are currently using Cadence for almost all layout design in the MEMS Laboratory at Carnegie Mellon University

Cadence Help Pages

Physical Design Kits

  • magic - a nifty layout program, freeware initiated at Berkeley

Magic startup instructions

Magic Technology files for MOSIS and MUMPs layout

Magic Tutorial - Ch. 1, Ch. 2, Ch. 3, Ch. 4, Ch. 5, Ch. 6, Ch. 7, Ch. 8, Ch. 9, Ch. 10, Ch. 11

Magic Home Page from Digital's Western Research Lab

  • xkic - a simple layout program, freeware from Berkeley

KIC Tutorial

ciftokic and kictocif instructions (converts between CIF and KIC format)

CIF file format

  • kic2abaqus2d - program that converts KIC layout to ABAQUS deck of 2D solid elements
  • CaMEL - a parameterized layout generator for the MUMPs process from MCNC CaMEL README file
  • mag2mif - converts Magic layout files to FrameMaker MIF (in PICT format)
  • pplot - converts CIF layout to PostScript file
  • xchiplogo - Xchiplogo reads an ascii bitmap file (which can be grabbed from screen by xv), and converts it into a magic or cif file. It is a handy program for creating logos of text or graphics for putting on VLSI chips xchiplogo README file

Simulation Tools

  • Cadence Composer schematic capture can be used as a front-end for HSPICE, Saber (when we install a socket), and Spectre

Cadence Help Pages

  • Saber - a multi-domain HDL simulation tool

Saber startup instructions

Saber_sketch MEMS elements for simulation.

  • Mathematica - a symbolic math program (like MAPLE)

Mathematica README file

  • ABAQUS - Mechanical finite-element program (can do electrostatic, thermoelectric, thermomechanical, piezoelectric simulations)

ABAQUS README file, including instructions for post-processing, and plotting views to ps and idraw formats.

kic2abaqus2d - program that converts KIC layout to ABAQUS deck of 2D solid elements

abaqus3d - program that converts simple ascii file format to ABAQUS deck of 3D solid elements (Thanks to Fei Wong for creating this program!)

See the script template for an example of the file syntax.

Automatic meshing - Automatic meshing of surface micromachined structures

  • MEMCAD - MEMCAD has changed its name to CoventorWare. The previous versions of MEMCAD are no longer supported.
  • MEMULATOR - For creating 3D solid models of your layout. See
    /afs/ece/project/mems/memulation.
    For more information see the readme
  • CoventorWare - The new version of MEMCAD is called coventorware. The tool is Framework for self-consistent electromechanical 3D numerical simulation. Uses FASTCAP, and ABAQUS. runs on all Solaris machines only.

    Coventor PC User - Special instructions for PC users

    Automatic meshing - Automatic meshing of surface micromachined structures

    Automatic meshing - Cadence MEMS tool for Automatic meshing

  • I-DEAS - Solid Modeler and Finite element tool used in MEMCAD. Runs on all AIX machines (you should probably stick to lagrange or spirit since they have lots of memory).
  • Ansoft HFSS - High Frequency Electromagnetic field solver.
  • dymola : a behavioral simulator from Sweden. We don't have this software, but it's interesting!
  • CFDRC - Simulation software for Computational Fluid Dynamics (CFD), multi-physics, and multi-disciplinary analyses.
  • xansys56 - ANSYS finite element analysis software enables engineers to
    (1) Build computer models or transfer CAD models of structures, products, components, or systems.
    (2) Apply operating loads or other design performance conditions.
    (3) Study physical responses, such as stress levels, temperature distributions, or electromagnetic fields.
    (4) Optimize a design early in the development process to reduce production costs.
    (5) Do prototype testing in environments where it otherwise would be undesirable or impossible (for example, biomedical applications).

    • Link to ANSYS Tutorial developed for self-paced learning by CMU Mech E Department