The STS DRIE system is location in the Clean Room (F level). Responsibilities include:

• Setting up a standard operating procedure (SOP)
• Upkeep and maintenance such as cleaning, providing log sheets, etc.
• Contacting manufacturer if a problem arises due to equipment malfunction. Renewing any warranties or maintenance contracts.
• Current Maintenance needed:
  • The STS DRIE system is maintained by the clean room staff.