MEMS Bulletin
To post info please email
glopez@cs.cmu.edu
Books, catalogs, manuals, and CDs in
our collection (Room 1205)
Jobs and Tasks Pending
Clean-up lab bench tops and sort tools after each day. Please be
organized so that other lab users can use the facilities.
New Clean Up Day will be planned!
News
3/5/00
Acquisitions and Equipment Update.
1) We
have the XeF2 etcher installed in HH 1214.
Mike Stout (mstout@ece) is characterizing
the machine etch rates as well as CMOS compatibility.
2) During
an online auction of items at the Westinghouse semiconductor plant in
Monroeville, we were able to acquire approx. 20 or so hotplates along with
other items ($600). These will be used
for the MEMS class as well as our everyday use.
3) A
sputtering/evaporation system has been ordered from International Delta
Systems. They were able to give us
a very reasonable price ($39,500) along with custom features. It should arrive in approx. 8-10 weeks. To see more specifics, please talk to George
(glopez@cs).
4) A
Dektak profilometer was ordered using funds from the Intel class grant
($31,000). This will be located in HH
1216, next to the Lesker sputtering machine.
Throughout the Fall semester, students in the MEMS course will be
conducting characterization using this station.
5) A
UV flood exposure system was lent to the MEMS lab for use in the Fall MEMS
course. The system will allow students
to experience crude photolithography.
6) The
K&S wire bonder had some problems about 3 weeks ago. It was returned (again) to K&S for
repair. According to Mike Stout (mstout@ece), the machine has returned and being
tested.
7) The
Lesker sputtering machine is down for repairs, yet its DC sputtering capability
works.
8) The
DV500 video capture board that we purchased in December has been returned due
to its incompatibility with Windows NT.
Keith (rebello@ece) is looking into
alternative boards, which meet our compatibility issues.
9) 200
more 4 inch wafers have been ordered for carrier wafers purposes (DRIE, etc.)
10) We found the small metal chamber used to test
devices in a vacuum. Hao found it in HH
1209 above a desk.
Software IssuesAcquisitions and Equipment Update.
1) mems@ece is now hooked up on GB ethernet in HH1208. Amazing download speeds from sites on the GB ethernet have yet to be demonstrated. We are probably limited to 100 Mb/s because Pittsburgh Supercomputing Center is not connected to the high-speed Internet backbone yet.
2) Both
memcad 4.6 and flumecad are now fully operational. There should be 5 licenses
for everyone on any Sun.
3) CFDRC
6.1 has been installed and is fully operational. There are 5 licenses on elvis that can only be used for a
specific grant (see Tamal), and a single floating license on all the other
machines available to the rest of the lab.
Paper Acceptance
Congrats to Huikai and Lars for being accepted into
Hilton Head 2000.
10/21/99
Acquisitions and Equipment Update.
1) Karl
Suss MA56 aligner is up and running with the bare essentials. For now, Lars Erdmann is the superuser in
charge of providing any necessary instruction.
We are planning on sending out a generic 5"x5" mask with
standard shapes. If you are interested
in making designs on this mask, please use the poly1 layer in MOSIS to make
your patterns and then email me the CIF file by November 5th.
2) XeF2
etcher will be arriving in a few weeks.
For more information about this machine please go to
http://www.xetch.com The XeF2 powder
needs to be ordered as well as special fittings needed for the machine
3) A
new CD burner has been placed on Typhoid (HH 1212).
4) Blish
(HP printer) has been disfunctioning for the past weeks. Tomorrow we will drop it off at an HP
service center.
5) Vacuum
oven is functional (located in HH 1214)
6) The
Wirebonder will be packaged and sent to K&S on the 28th for alignment and
servicing.
7) A
new single axis rate table is in the lab (HH 1212). For more information please talk to Phil Yoon.
8) Chem
lab has photoresist and developer (AZ4620, AZ 4210, and AZ 4526 (Thanks Lars)).
9) We
have a new overhead projector for transparencies as well as a new InFocus
projector that hooks up to a laptop.
10) Adobe
Premiere is installed on the computer next to the probe station. We can now make short AVI movie files using
the camera attached on top of the station.
This involves first grabbing the frames using a DOS executable, then
porting them over to Premiere. If you
would like a demonstration please email me.
9/9/99
Acquisitions.
1) We
have our new spinner set up in the chem lab.
I will be placing generic programs for AZ photoresist of various
thicknesses on the memory. If anybody needs to use it, please email me for
certification/approval.
2) Two
weeks ago a new shipment of numerous HP function generators, power supplies,
and multimeters came in. They are
located in the MEMS Lab. Thanks John.
3) A new framegrabber has been installed on the PC next to the probe station. As of now it has no network capability (is was my old PC in Robotics), eventually gripe will network it. The framegrabber can only grab images as of now, I have to write C/C++ code for the video streaming under Windows NT.
4) A
new wire bonder was donated by IBM, minus instrucation manuals and
stereoscope. Looks like it needs a lot
of work to get it in working shape.
5) A
new Teflon holder for MUMPs release and Teflon beaker were machined by the ECE
shop for us. If you need to use them,
please email Mike Stout.
8/30/99 New Grant.
We were recently informed that CMU was awarded the Intel RFP for
MEMS Instructional Laboratory. This award
gives the MEMS Lab $150,000 to set up instructional facilities (this includes
CAD and characterization workstations, probe-cards, equipment, etc.) for the
MEMS course.
6/28/99 MOSIS. The complete archive of all MOSIS
submissions till date can be accessed by including the following statement in
you cds.lib file in your cadence directory. Thanks to Kai He for the effort.
INCLUDE
/afs/ece.cmu.edu/usr/mems/.vol10/cadence_mosis/cds.lib
Also information on all mosis runs can be accessed at http://www.ece.cmu.edu/~mems/mems-cmu/mosis/cmos-mems/submit_data.html
6/16/99 New Grant. Gary and
Ken have been awarded a new DARPA contract to develop a CMOS-based
micromachining MUMPS. CMU is partnering with Cronos Integrated Microsystems and
MEMSCAP to develop the desi gn tools, cell libraries, engineering design kits
and fabrication processes to implement the Application-Specific Integrated-MEMS
Process Service (ASIMPS). We anticipate the award starting in late August or
early fall and running through to 2002.
6/16/99 New Administrator.
The MEMS Laboratory is proud to welcome the new Lab Executive Administrator,
Ms. Mary Moore. Mary comes to CMU with a broad and mixed background in teaching,
industry and the diplomatic service. As Lab Executive Administrator, Mary will
be the "chief operating officer" of the laboratory, responsible for
the day-to-day administrative and financial operations of the laboratory.
Mary's most recent position was at System Planning Corporation where she was
Corporate Conference Coordinater for all DARPA activities. From 1991-1997, she
was a Research Analyst in the Advanced Technology Center, leading a team of
program assistants providing administrative and financial support to DARPA 's
MEMS Program and later to the Director of the Electronics Technology Office.
Mary has a Bachelor of Science in Exceptional Education with additional
graduate work in education philosophy and information systems. Please plan on dropping
by and welcoming Mary on her first day, Tuesday, July 6, 1999.
6/04/99 Coffee! We have a new Espresso maker, a 10-cup
Braun coffee machine, a milk frothing pitcher and a variety of coffees located
at the kitchen area of the MEMS wing.
6/02/99 Supplies. There are now shared supplies available
in the cabinet in the lab. Feel free to take supplies as needed, but be sure to
sign out what you take on the sign-out sheet. (Message by Mike Stout)
5/30/99 MEMS Library.Books, catalogs,
manuals, and CDs.
5/30/99 MUMPs release. Instructions to do a MUMPs release
are given at: http://www.ece.cmu.edu/~mems/mems-cmu/Chip-Release/index.html(
You can get to it th rough the Intranet page, at the very bottom).
5/24/99 MEMS Library. The MEMS Library is basically
complete. A list of all the books, catalogs, CDs, and manuals will follow soon.
If you use anything, please return to its original location. Also make sure to
write your name and email on the checkout sheet when you take any material.
5/5/99 Tip On printer 'lem', always use the Tektronix
transparencies. Never use any other brand or else the printer starts to streak
and cause problems. There is a box of Tektronix transparencies in the cabinet
under the printer.
5/3/99 Problem The teflon die holder will be redesigned
with the handle perpendicular to the dies and the middle layer will affixed to
the base. Sent to shop to get holes drilled and taps.
5/3/99 Tip Some people have had trouble with faded colors
on lem. Please note that the middle tray is for transparencies only. If you
print from paper in that tray, the printer thinks it's going to print on
transparencies, and will adjust the ink amount accordingly. Apparently, the
amount/colors of ink appropriate for transparencies is not enough to give a
good image on paper. The default is now set to the lower tray. If you would
like to print on transparencies you have to either send the right command (easy
for PC, check the transparency option under tray settings), or go to the
printer and change the default. Also if you want to use glossy coated paper, it
can only be inputted through the multi-purpose tray (located on the left of the
printer). Again you have to specify this under tray settings.
4/28/99 Practice Qualifier Huikai's practice
qualifier will be held Thursday @ 4:30pm at the MEMS Conference room.
4/28/99 Acquisitions not previously reported:
4/28/99 Acquisitions New Tektronix Phasor 740 color printer
located at room 1207. The printer is called 'lem'. To print without a cover
sheet enter the following command: lp -dlem <filename>. Has duplexing
capabilities.
4/28/99 Acquisitions New MEMS books are available in room
1207. Software manuals, catalogs (paper and CD), and reference books can be
found there. Check-out sheet is on shelf.
4/20/99 Acquisitions New refrigerator and microwave is
installed in room 1207.
4/21/99 Acquisitions New teflon holder is made for
releasing dies. The holder can hold up to nine '1 cm by 1 cm' dies (made for
MUMPS MCNC dies).
4/16/99 Tasks Clean-up day at the MEMS Lab. Everything is
organized and lab benches are divided into appropriate tasks.