David W. Greve


EDUCATION


RECENT POSITIONS


RESEARCH INTERESTS

The fabrication of advanced semiconductor devices requires an understanding of the basic science underlying each process step and its connection with device and circuit performance. Developing this understanding requires an unusually interdisciplinary approach, bringing together ideas from physics, chemistry, materials science, and a variety of engineering disciplines. My research has been directed at exploring this relation between process technology and semiconductor device performance. Past work has included studies of polysilicon fuses and antifuses; polysilicon emitter bipolar transistors; thin film transistors for flat panel displays; and high temperature superconductors on non-lattice-matched substrates. Much of my present research is related to silicon integrated circuit technology. I have been exploring the epitaxial growth by chemical vapor deposition of germanium-silicon alloys, which have applications in heterojunction bipolar transistors, buried channel field effect transistors, and far-infrared optical detectors. Another research project concerns the development of advanced diagnostic and control strategies for semiconductor processes. Other recently initated research has been on various aspects of wide-gap semiconductors. This work includes the application of MOCVD-grown AlGaN alloys to ultraviolet detectors and also studies of the surfaces of MBE-grown GaN. My research has a strong experimental component, and has frequently involved collaborations with other departments or other areas within Electrical and Computer Engineering.


TEACHING INTERESTS

An engineering education should give students an understanding of "how things work" which is based on fundamental science; the ability to perform engineering analyses; and, most important, the ability to approach real problems which lack unique, closed-form solutions. I have worked to incorporate these elements in my undergraduate teaching. My specific teaching interests at the undergraduate level include semiconductor device physics and analog circuit design. Innovations in these undergraduate courses include the implementation of an all-design laboratory for analog circuits and the development of a new course on field effect devices and their applications. The latter course is novel in its applications emphasis, the inclusion of new material on imaging and display devices, and the use of Mathcad as an integral part of the course. I have written a textbook for this course that will be published by Prentice Hall in 1998. I have also contributed to the design of an Electronic Materials minor, and now serve as co-director of this program. At the graduate level, I have taught a variety of courses on advanced semiconductor devices and semiconductor process technology. Particularly in upper level courses, I have emphasized the connection between process technology and device performance and the strong interdisciplinary nature of these fields.

I am broadly interested in the continuing evolution and re-invention of the ECE curriculum. Engineering curricula are not static; rather, they continuously change in response to internal forces and external forces. I am interested in developing joint undergraduate programs with other departments (our Electronic Materials minor presently in place is an example of such a program) and also in issues relating to curriculum design and accreditation.
 

FELLOWSHIPS


MEMBERSHIPS


PROFESSIONAL ACTIVITIES

Divisional Editor, Electrochemical Society (Electronics Division, 1986-1990)
 
Program Committee and Co-chairman of session on Diffusion and Ion Implantation, Sixth International Symposium on Silicon Materials Science and Technology, (Spring 1990 Meeting of the Electrochemical Society, Montreal, Canada)
 
Program Subcommitee, International Electron Devices Meeting, 1989 and 1990 (Detectors, Sensors, and Displays)
 
Subcommittee Chair, International Electron Devices Meeting, 1991 (Detectors, Sensors, and Displays)
 
Co-chairman, Quantum Devices Session at Silicon- Based Heterostructures II, American Vacuum Society Fall Meeting, (Chicago, IL, November, 1992).
 
Co-chairman, Session on Integrated Processing for Optoelectronics, European MRS, (Strasbourg, France, May, 1993).
 
Chairman, Session at the Active Matrix Liquid Crystal Displays Symposium, (Bethlehem, PA, October, 1993).
 
NSF review panel, Solid State Microstructures SBIR grants (Washington DC, October, 1993).
 
NSF Panel for Solid State and Microstructures Program, (Washington DC, May 24, 1994).
 
NSF SBIR Panel (Washington, DC, 1995).
 
Co-chairman, session on GeSi materials and devices, Materials Research Society Spring Meeting, (April, 1996, San Francisco, CA).
 
Session co-chair, Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, (Electrochemical Society Spring Meeting, Montréal, Canada, April, 1997).


UNIVERSITY SERVICE


DEPARTMENTAL SERVICE


CONSULTING

STUDENTS SUPERVISED

M.J. Saccomango, M.S. (1983)
R. Prasad, M.S. (1987)
D.-L. Chen, M.S., Ph.D. (1987)
P.A. Potyraj, Ph.D. (Physics, 1987)
M.K. Hatalis, Ph.D. (1987)
J. Pickering, M.S. (Met. Engrg. and Mat. Sci., 1988)
B.C. Hseih, Ph.D. (1988)
P.H.L. Rasky, (co-advised with M.H. Kryder) M.S., Ph.D. (1989)
M. Racanelli, M.S. (1989), Ph.D. (1991)
A.K. Stamper (co-advised with T.E. Schlesinger), Ph.D. (1991)
R. Misra, Ph.D. (1995)
R. Strong, M.S. (1993), Ph.D. (1996)
M. Johnson, (co-advised with A.J. Strojwas) Ph.D. (1993)
T. Knight, M.S. (1994); Ph.D. (1997)
X. Cheng, Ph.D. (co-advised with B.H. Krogh, 1996)
S. Vyas, M.S. (Mat. Sci. and Engrg., 1994)
R. Desrosiers, M.S. (1996)
J. Ganong, M.S. (1997)
C. Chan, M.S. (principal advisor, A. Gellman, Chem. Engrg., 1997)
A. Mocuta, Ph.D. (ECE, 1999)
M. Shin, Ph.D. (principal advisor, M. Skowronski, Mat. Sci. And Engrg., in progress)
S. Min, Ph.D. (in progress; Mat. Sci. And Engrg.)
V. Ramachandran, Ph.D. (principal advisor, R. Feenstra, Physics, in progress)
X. Zhu, Ph.D. (in progress; principal advisor G. Fedder)
T. Kuhr, (Mat. Sci. and Engrg., in progress, co-advised with M. Skowronski)
Q. Zhao, Ph.D. (in progress)
 
M. Migliuolo (postdoctoral fellow, collaboration with T. E. Schlesinger and D. Stancil, 1988)
T.Y. Ma (postdoctoral fellow, 1989)
A.Y. Polyakov (postdoctoral fellow, collaboration with M. Skowronski, MSE, 1995-1996)
A. Smith (postdoctoral fellow, collaboration with R. Feenstra, Physics 1996-present)
J. Fan (visiting research engineer, 1998-1999)
 
Undergraduate project students (23)
 

COURSES TAUGHT